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Evaluation of Compositional Change in Masklessly Deposited Lines by Micro-Rbs Analysis

  • A. Kinomura (a1), M. Takai (a1), Y. F. Lu (a1), S. Namba (a1), M. Satou (a2) and A. Chayahara (a2)...

Abstract

Compositional deviation from the standard stoichiometry of tin-oxide and silicon-oxide lines masklessly deposited by laser-induced thermochemical reaction was investigated by micro Rutherford backscattering (RBS). Micro-RBS spectra of the lines deposited with various laser powers indicated that the stoichiometry of the deposited lines for both tin-oxide and silicon-oxide was improved by the increase in laser power. A tomographic image of the tin-oxide line showed a compositional inhomogeneity across the line.

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1 Ehrlich, D. J. and Tsao, J. Y., J. Vac. Sei. Tech. B1, 969 (1983).
2 see for example: Principles and Application of High Energy Ion Microbeams, ed. Watt, F. and Grime, G. W. (Adam Hilger, Bristol, 1987).
3 Doyle, B. L., Nucl. Instr. & Meth. B15, 654 (1986).
4 Kinomura, A., Takai, M., Matsuo, T., Satou, M., Chayahara, A. and Namba, S., Jpn. J. Appl. Phys. 28, L1286 (1989).
5 Takai, M., Kinomura, A., Inoue, K., Matsunaga, K., Izumi, M., Gamo, K. and Namba, S., Nucl. Instr. & Meth. B30, 260 (1988).
6 Tokuda, J., Takai, M., Gamo, K. and Namba, S., Mater. Res. Soc. Proc. 101, 261 (1988).
7 Lu, Y. F., Takai, M., Kinomura, A., Sanda, H. and Namba, S., submitted to Lasers in Materials Engineering.
8 Hobbs, C. P., McMillan, J. W. and Palmer, D. W., Nucl. Instr. & Meth. B30, 342 (1989).

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