Skip to main content Accessibility help
×
×
Home

Evaluation of a vertical tube concept for RTP

  • Byung-Jin Cho (a1), Peter Vandenabeele (a1) and Karen Maex (a1)

Abstract

A new RTP system concept is proposed and demonstrated. The system uses a vertical cylindrical quartz tube, while the wafer is placed horizontally. Linear halogen lamps are arranged in an hexagonal shape. Optimal power control results in a temperature difference within ±1.5 °C over a 6 inch wafer in steady state. Oxidation under optimal conditions results in a 1.37% standard deviation for an average oxide thickness of 110.4 Å. The temperature nonuniformity during the transient has been greatly improved by using dynamic control. The main advantages of this new system concept are its excellent temperature uniformity and the good accessibility of the wafer for technological treatments and in situ measurements.

Copyright

References

Hide All
[1] Norman, S. A., “Optimization of wafer temperature uniformity in rapid thermal processing systems,” ISL Technical Report No. 91-SAN-l, Stanford Univ.,Stanford, CA, 1991.
[2] Moslehi, M. M. et al. , “In-situ fabrication and process control techniques in rapid thermal processing,” Mat. Res. Soc. Symp. Proc., vol. 224, p. 143, 1991.
[3] Apte, P. P. and Saraswat, K. C., “Rapid thermal processing uniformity using multivariable control of a circularly symmetric 3 zone lamp,” IEEE Trans. Semicond. Manufact., vol. 5, no. 3, p. 180, 1992.
[4] Roozeboom, F., “Temperature control and system design aspects in rapid thermal processing,” Mat. Res. Soc. Syrp. Proc., vol. 224, p. 9, 1991.
[5] Vandenabeele, P. and Maex, K., “Temperature control and temperature uniformity during rapid thermal processing,” Mat. Res. Soc. Symp. Proc., vol. 224, p. 185, 1991.
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed