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Estimation of the Crystallinity of P-type Hydrogenated Nanocrystalline Cubic Silicon Carbide by Conductive Atomic Force Microscopy

  • Daisuke Hamashita (a1), Yasuyoshi Kurokawa (a1) and Makoto Konagai (a1) (a2)

Abstract

P-type hydrogenated nanocrystalline cubic silicon carbide is a promising material for the emitter of n-type crystalline silicon heterojunction solar cell due to its lower light absorption and wider bandgap of 2.2 eV. The electrical properties of hydrogenated nanocrystalline cubic silicon carbide can be influenced by its crystallinity. In this study, we propose the use of conductive atomic force microscopy (Conductive-AFM) to evaluate the crystalline volume fraction (f c) of p-nc-3C-SiC:H thin films (20∼30 nm) as a new method instead of Raman scattering spectroscopy, X-ray diffraction, and spectroscopic ellipsometry.

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1. Kinoshita, T., Fujishima, D., Yano, A., Ogane, A., Tohoda, S., Matsuyama, K., Nakamura, Y., Tokuoka, N., Kanno, H., Sakata, H., Taguchi, M., Maruyama, E., Proceedings of the 26th European Photovoltaic Solar Energy Conference, (2011) 871874
2. Miyajima, Shinsuke, Yamada, Akira, Konagai, Makoto, Japanese Journal of Applied Physics, 43 (2004) 11901192
3. Hamashita, D., Kurokawa, Y., Konagai, M., Proceedings of the 37th IEEE Photovoltaic Specialist Conference, (2011)
4. Hamashita, D., Miyajima, S., Yamada, A., Konagai, M., Proceedings of the 35th IEEE Photovoltaic Specialist Conference, (2010) 36673670
5. Miyajima, S., Sawamura, M., Yamada, A., Konagai, M., Japanese Journal of Applied Physics, 46 No. 28 (2007) 693695
6. Miyajima, S., Sawamura, M., Yamada, A., Konagai, M., Journal of Non-Crystalline Solids, 354 (2008) 23502354
7. Rezek, B., Stuchlik, J., Fejfar, A., Kocka, J., Journal of Applied Physics, 92 (2002) 587
8. Shen, Z., Eguchi, M., Gotoh, T., Yoshida, N., Itoh, T., Nonomura, S., Thin Solid Films, 516 (2008) 588592
9. Hamashita, D., Kurokawa, Y., Konagai, M., Energy Procedia, 10 (2012) 1419
10. Bietsch, A., Alexander Schneider, M., Bruno, M., Journal of Vaccum Science and Technology B, 18 (2000) 1160.
11. De Cesare, G., Galluzzi, F., Guattari, G., Leo, G. and Vincenzoni, R., Bemporad, E., Diamond and Related Materials, 2 (1993) 773777
12. Miyajima, S., Sawamura, M., Yamada, A., and Konagai, M., Japanese Journal of Applied Physics, 46 No. 28 (2007) 693695

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Estimation of the Crystallinity of P-type Hydrogenated Nanocrystalline Cubic Silicon Carbide by Conductive Atomic Force Microscopy

  • Daisuke Hamashita (a1), Yasuyoshi Kurokawa (a1) and Makoto Konagai (a1) (a2)

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