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Er-Doped Amorphous and Crystalline Al2O3 and La2O3 Films Grown with Low Energy Ions From an Ecr Plasma

  • J. C. Barbour (a1), B. G. Potter (a1), D. M. Follstaedt (a1), J. A. Knapp (a1) and M. B. Sinclair (a1)...

Abstract

The effects of low energy ions from a biased electron cyclotron resonance plasma during growth of Al2O3 and La2O3 are used to modify the density and crystalline quality of these oxide films. The type of phase formed for Al2O3 is varied with the ion-assisted growth from amorphous to crystalline γA12O3. The photoluminescence (PL) properties of different Er-doped Al- and La-oxide phases are examined, and through comparison of the PL spectra, the local environment of Er in these oxide materials is discussed.

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[1] Barbour, J.C., Follstaedt, D.M., and Myers, S.M., Nucl. Instrum. Methods B 106, 84 (1995).
[2] Villars, P. and Calvert, L.D., Pearson's Handbook of Crystallogqraphic Data for Intermetallic Phases, (American Society for Metals, Metals Park, OH, 1985), pp. 10472631.
[3] Bendale, R.D. and Simmons, J.H., University of Florida (private communication).
[4] Alves, E., Silva, M.F. da, Hoven, G.N. van den, Polman, A., Melo, A.A., and Soares, J.C., Nucl. Instrum. Methods B 106, 429 (1995).
[5] Verdozzi, C.F. and Jennison, D.R., Sandia National Laboratories, NM (private communication).

Er-Doped Amorphous and Crystalline Al2O3 and La2O3 Films Grown with Low Energy Ions From an Ecr Plasma

  • J. C. Barbour (a1), B. G. Potter (a1), D. M. Follstaedt (a1), J. A. Knapp (a1) and M. B. Sinclair (a1)...

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