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Epitaxial Growth of Nb Films and Nb/Cu Bilayers on A12O3 Substrates by DC Magnetron Sputtering

  • R. Loloee (a1), M.A. Crimp (a1), W. Zhu (a1) and W.P. Pratt (a2)

Abstract

Epitaxial single crystal Nb films have been grown by sputter deposition on (1 1 2 0) sapphire substrates. Subsequently, high quality epitaxial Cu films, with two orientation variants, have been grown onto the epitaxial Nb films. The sputtered films have been characterized using atomic force microscopy, electron backscattered patterns, and conventional transmission electron microscopy.

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