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Epitaxial growth of LiNbO3 thin films by excimer laser ablation method and their surface acoustic wave properties

  • Yoshihiko Shibata (a1), Kiyoshi Kaya (a1), Kageyasu Akashi (a1), Masaki Kanai (a2), Tomoji Kawal (a2) and Shichlo Kawal (a2)...


We have formed epitaxial LiNbO3 thin films on sapphire substrates (001),(110) and (012) using an excmer-laser ablation technique. We have fabricated surface acoustic wave (SAW) filters on the films and evaluated SAW properties. It is demonstrated that the LINbO3 thin films on the sapphire substrates are candidates for a high frequency SAW filter because of their high velocities of propagation (5300–5600m/s).



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1. Shibata, Y., Kaya, K., Akashi, K., Kanal, M., Kawal, T. and Kawai, S., Appl. Phys. Lett., 61, 1000 (1992).
2. Nashimoto, K. and Cima, M.J., Materials Letters, 10, 348 (1991).
3. Tancrell, R.H., Proc. of IEEE, 59, 393 (1971).


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