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Epitaxial Growth of AlN on Si Substrates with Intermediate 3C-SiC as Buffer Layers

  • S. Q. Hong (a1), H. M. Liaw (a1), K. Linthicum (a2), R. F. Davis (a2), P. Fejes (a1), S. Zollner (a1), M. Kottke (a1) and S. R. Wilson (a1)...

Abstract

Single crystalline AlN was successfully grown on a 3C-SiC coated Si (111) substrate by organometallic vapor phase epitaxy. The 3C-SiC film was obtained via the conversion of the Si near-surface region to SiC using gas-source molecular beam epitaxy. The quality of the AlN was mainly controlled by that of the SiC. The effects of Si pits and SiC hillocks formed during the conversion on subsequent AlN growth are discussed. Process optimization is suggested to improve the SiC buffer layer for subsequent AlN deposition.

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[1] Trew, R. J., Yan, J., and Mock, P. M., Proc. IEEE 79–5, 598 (1991)10.1109/5.90128
[2] Nishino, S., Powell, J.A. and Will, H.A., Appl. Phys. Letters 42, 460(1983).10.1063/1.93970
[3] Sywe, B.S., Yu, Z.J., Burckhard, S., Edgar, J. H. and Chaudhuri, J., J. Electrochem. Soc. 141, 510(1994).10.1149/1.2054756
[4] Schmitt, J., Troffer, T., Christiansen, K., Christiansen, S., Helbig, R., Pensl, G., Strunk, H.P., Materials Science Forum 264–268, pt.1, 247 (1998).
[5] Davis, R. F., Tanaka, S., Rowland, L. B., Kern, R. S., Sitar, Z., Ailey, S.K., Wang, C., J. of Crystal Growth 164, 132(1996).10.1016/0022-0248(95)01023-8
[6] Tanaka, S., Kern, R.S., Bentley, J. and Davis, R.F., to be submitted.
[7] Liaw, H. M., Hong, S.Q., Fejes, P., Werho, D., Tompkins, H., Zollner, S., Wilson, S. R., Linthicum, K. and Davis, R. F., this volume.
[8] Li, J.P. and Steckl, A.J., J. Electrochem. Soc. 142, p634 (1995).10.1149/1.2044113

Epitaxial Growth of AlN on Si Substrates with Intermediate 3C-SiC as Buffer Layers

  • S. Q. Hong (a1), H. M. Liaw (a1), K. Linthicum (a2), R. F. Davis (a2), P. Fejes (a1), S. Zollner (a1), M. Kottke (a1) and S. R. Wilson (a1)...

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