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Environmental Issues of Perfluorocompounds in the Semiconductor Industry

Published online by Cambridge University Press:  10 February 2011

Jeffrey D. Williams
Jeffrey D. Williams*
Affiliation:
Department of Defense, Ft. George G. Meade, MD 20755
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Abstract

A critical class of semiconductor manufacturing compounds is the family of perfluorocompounds, or PFCs. Originally thought to be environmentally benign compounds, they are likely long-lived atmospheric compounds with high global warming potentials. This paper reviews the options available to industry to reduce PFC emissions. Process optimization, chemical substitution, abatement, and recovery will be discussed as they relate to specific processes. Each will be reviewed with respect to the particular gas affected and the potential impact realized. Collateral environmental impacts will also be discussed. Finally, the voluntary EPA program, the PFC Emission Reduction Partnership for the Semiconductor Industry, will be presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 447: Symposium L – Environmental, Safety, and Health Issues in IC Pro…… , 1996 , 43
Copyright
Copyright © Materials Research Society 1997

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