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Enhancement in Adhesion of Pt Films on Ceramics by Helium Ion and Electron Irradiation, and a Study of their Electrochemical Behaviour.

Published online by Cambridge University Press:  25 February 2011

D.K. Sood ,
P.D. Bond  and
S.P.S. Badwal
D.K. Sood
Affiliation:
Microelectronics Technology Centre, Royal MelbourneInstitute of Technology, Melbourne 3000 Australia.
P.D. Bond
Affiliation:
Microelectronics Technology Centre, Royal MelbourneInstitute of Technology, Melbourne 3000 Australia.
S.P.S. Badwal
Affiliation:
CSIRO Division of Materials Science, Advanced Materials Laboratory, P.O. Box 4331, Melbourne 3001, (Australia)
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Abstract

The adhesion of Pt films (10–330nm thick) sputter deposited on prepared substrates of yttria stabilized zirconia (YSZ) and alumina has been observed to be remarkably enhanced after irradiation with 2 MeV He++ ions and 5–30 keV electrons. The adhesion enhancement has been studied as a function ot beam energy, dose and film thickness. Thermal stability of adhesion enhancement and of the microstructure of ‘stitched’ films has been investigated. The electrochemical behaviour of ‘stitched’ Pt electrodes on YSZ has been studied by complex impedance spectroscopy.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 27: Symposium E – Ion Implantation and Ion Beam Processing of Materials , 1983 , 565
Copyright
Copyright © Materials Research Society 1984

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References

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