Skip to main content Accessibility help
×
Home

Enhanced Hydrogenation Due to Ultrasound Treatment in Polycrystalline Silicon: New Approach to Thin Film Defect Engineering

  • S. Ostapenko (a1), W. Henley (a1), S. Karimpanakkel (a1), L. Jastrzebski (a1) and J. Lagowski (a1)...

Abstract

We applied the ultrasound treatment (UST) to improve properties of poly-Si thin films on glass substrates for thin-film transistor applications. A strong decrease of the sheet resistivity in hydrogenated films subjected to UST was observed. UST improves the film homogeneity as monitored by spatially resolved surface photovoltage mapping. Studies of hydrogenated thin-film transistors demonstrated remarkable UST induced improvement in transistor characteristics, especially, a reduction of leakage current by as much as one order of magnitude. All these effects are explained in terms of UST enhanced hydrogenation of poly-Si film.

Copyright

References

Hide All
1. Wu, I.W., Huang, Tiao-Yuon, Jackson, W.B., Lewis, A.G., and Chiang, A., IEEE Electron Device Letters, 12, 181 (1991).
2. Ostapenko, S., Henley, W., Karimpanakkel, S., Jastrzebski, L., and Lagowski, J. in Proceedings of International Display Research Conference (Monterey, California 1994), pp.299302
3. Ostapenko, S. and Bell, R., Appl.Phys.Lett., 77 (10), (1995).
4. Bell, R., Ostapenko, S., and Lagowski, J.. This MRS Proceedings.
5. Ostapenko, S., Jastrzebski, L., Lagowski, J., and Sopori, B., Appl.Phys.Lett., 65, 1555 (1994).
6. Seager, C.H. and Ginley, D.S., Appl. Phys. Lett., 34, 337 (1979).
7. Nickel, N.H., Johnson, N.M. and Jackson, W.B., Appl.Phys.Lett., 62, 3285 (1993).
8. Nickel, N.H., Jackson, W.B., and van der Walle, C., Phys.Rev.Lett, 72, 3393 (1994).
9. Pavlovich, V.N., Phys.Stat.Sol (b), 180, 97 (1993).
10. Nickel, N.H., Jackson, W.B., and Johnson, N.M., Phys. Rev. Lett., 71, 2733 (1993).

Enhanced Hydrogenation Due to Ultrasound Treatment in Polycrystalline Silicon: New Approach to Thin Film Defect Engineering

  • S. Ostapenko (a1), W. Henley (a1), S. Karimpanakkel (a1), L. Jastrzebski (a1) and J. Lagowski (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed