Skip to main content Accessibility help
×
Home

Engineered Low Resistivity Titanium-Tantalum Nitride Films by Atomic Layer Deposition

  • Ana R. Londergan (a1), Jereld L. Winkler (a1), Kim Vu (a1), Lawrence Matthysse (a1), Thomas E. Seidel (a1) and Ofer Sneh (a1)...

Abstract

Atomic Layer Deposition (ALD) is an emerging ultra-thin film deposition technique for advanced microelectronics applications. Enabling features of ALD are precise control over film thickness, excellent conformality and relative insensitivity to wafer size. Additionally, ALD allows interface and film engineering that can be utilized to maximize device performance within the minimum feature size requirements. This paper reports on the compositional, structural and electrical properties of engineered Ti-Ta-N composite films grown by ALD at 360°C. For a wide range of composition these Ti-Ta-N films exhibit resistivity from 500 to 2000 μω-cm, high density, and 100 % step coverage. Additionally, the ability to control texture by changing film composition is established. Based on experimental results, an approach to grow Composite Engineered Barriers by ALD (CEBA) is described that could provide a solution to the challenging barrier requirements.

Copyright

References

Hide All
1. International Technology Roadmap for Semiconductors, 2000
2. Suntola, T., Thin Solid Films 216, p. 84, 1992
3. Satta, A., Beyer, G., Maex, K., Elers, K., Haukka, S. and Vantomme, A., Mat.Res.Soc.Symp.Proc. Vol. 612, 2000, p. D6.5.1, MRS
4. Martensson, P., Juppo, M., Ritala, M., Leskela, M., and Carlsson, J.-O., J.Vac.Sci.Technol. B17, p. 2122, 1999
5. Sneh, ofer, United States Patent # 6,200,893, March 13, 2001
6. Sneh, O., Clark-Phelps, R. B., Londergan, A. R., Winkler, J. and Seidel, T. E., submitted to Thin Solid Films

Engineered Low Resistivity Titanium-Tantalum Nitride Films by Atomic Layer Deposition

  • Ana R. Londergan (a1), Jereld L. Winkler (a1), Kim Vu (a1), Lawrence Matthysse (a1), Thomas E. Seidel (a1) and Ofer Sneh (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed