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Energy Dispersive X-ray Spectrometry With the Transition Edge Sensor Microcalorimeter: A Revolutionary Advance in Materials Microanalysis

Published online by Cambridge University Press:  10 February 2011

Dale Newbury ,
David Wollman ,
Kent Irwin ,
Gene Hilton  and
John Martinis
Dale Newbury
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899-8371
David Wollman
Affiliation:
National Institute of Standards and Technology, Boulder, CO 80303
Kent Irwin
Affiliation:
National Institute of Standards and Technology, Boulder, CO 80303
Gene Hilton
Affiliation:
National Institute of Standards and Technology, Boulder, CO 80303
John Martinis
Affiliation:
National Institute of Standards and Technology, Boulder, CO 80303
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Abstract

The NIST microcalorimeter energy dispersive x-ray spectrometer provides important advances in x-ray spectrometry. The high spectral resolution, approaching 2 eV for photon energies below 2 keV, the wide photon energy coverage, 250 eV to 10 keV, and the energy dispersive operation enable a wide range of materials characterization problems to be addressed. This performance is especially critical to high spatial resolution, low-voltage x-ray microanalysis performed with the field-emission gun scanning electron microscope.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 589 , 1999 , 75
Copyright
Copyright © Materials Research Society 2001

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References

1.Goldstein, J. I., Newbury, D. E., Echlin, P., Joy, D.C., Romig, A. D. Jr, Lyman, C. E., Fiori, C., and Lifshin, E., Scanning Electron Microscopy and X-ray Microanalysis, 2nd edition (Plenum Press, New York, 1992).Google Scholar
2.Wollman, D. A., Irwin, K. D., Hilton, G. C., Dulcie, L. L., Newbury, D. E., and Martinis, J. M., “High-resolution, energy-dispersive microcalorimeter spectrometer for X-ray microanalysis”, J. Micros., 188, (1997) 196–223.Google Scholar