Skip to main content Accessibility help
×
Home

Electronically Enhanced Reaction of Process-Induced Defects in GaAs

  • K. Wada (a1), H. Nakanishi (a2), K. Yamada (a3) and L.C. Kimerling (a4)

Abstract

The present paper reviews current understanding on enhanced reactions of process-induced defects in GaAs under electronic excitation. Device processing to be employed for point defect generation is Be ion implantation and Ar plasma etching. It is shown that reduction of electronic active centers is clearly enhanced by annealing under forward bias application and by annealing under reverse bias application at temperature as low as 200°C. The enhancement mechanisms are discussed in terms of recombination-enhanced defect reaction and structural instability induced by charge state effect.

Copyright

References

Hide All
[1] Wada, K., Appl. Surf. Sci. 85, 246, 4995.
[2] Yamada, K., Nakanishi, H., and Wada, K., Semicond. Sci. Technol. 7, A104, 1992.
[3] Wada, K., Nakanishi, H., and Kimerling, L.C., in “Defects in Semiconductors(Trans Tech Publishing), Vol. 127–140, 1401 (1996).
[4] Yamada, K., and Wada, K., 8th Conference on III-V Semi-insulator Materials (World Scientific, Singapore, 1994), p. 251.
[5] Wada, K., Appl. Phys. Lett., 63, 2525, 1993.
[6] Kimerling, L.C., Solid State Electronics, 21, 1391 (1978).
[7] Shinozuka, Y., Mater. Research Soc. 442, 225, 1997.
[8] Nakanishi, H. and Wada, K., Appl. Surf. Sci. 117/118, 605, 1997. K. Wada and H. Nakanishi, Mater. Research Soc. 442, 69, 1997.
[9] Nakanishi, H. and Wada, K., Supplement of Jpn. J. Appl. Phys.
[10] Jordan, C., Fewer, D.T., Donegan, J.F., McCabe, E.M., Huyuh, H., Logue, F.P., Taniguchi, S., Hino, T., Nakano, K., and Ishibashi, A., Appl. Phys. Lett. 72, 194, 1998

Electronically Enhanced Reaction of Process-Induced Defects in GaAs

  • K. Wada (a1), H. Nakanishi (a2), K. Yamada (a3) and L.C. Kimerling (a4)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed