This paper describes growth morphology and structure of rfmagnetron sputtered thin films of InN, studied by plan-view transmission electron microscopy (TEM) and by scanning electron microscopy (SEM). Films deposited on TEM grids, (0001) sapphire, (111) silicon and amorphous quartz were prepared for TEM by mechanical abrasion of the substrate followed by sputter etching. At low deposition temperatures (<400°C), films consisted of small, basal-oriented, columnar grains. Above 500°C, growth consisted of larger, faceted, basal-oriented, mesa-island grains. Observations of growth morphology and defect structure are correlated with structural, compositional and electrical properties.