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Electrical Properties Of Thin Polyimide Films Prepared By Ionized Cluster Beam Deposition

  • Hyung-Jin Jung (a1), Dong-Heon Lee (a1), Jeon-Kook Lee (a1) and Chung-Nam Whang (a2)

Abstract

The electrical properties of gold – polyimide - silicon structures were investigated experimentally by capacitance – voltage (C – V) measurement. Polyimide films were deposited on silicon substrate by using ionized cluster beam deposition (ICBD) of PMDA-ODA followed by in-situ thermal curing in N2 atmosphere. The resulting C – V plots show hysteresis, and it was believed to be due to the injection of carriers. The interface trap density is fairly low because of the clean interface provided by ICB technique.

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1. Sroog, C.E., J.Polym.Sci.Macromal.Rev., 11, 161 (1976).
2. Wilson, A.M., in Polyimides – Synthesis, Charaterization and Application, edited by Mittal, K.L. (Plenum, New York, 1984), Vol.2, p.715.
3. Wilson, A.M., Thin Solid Films, 83, 145 (1981).
4. Cho, S.J., Choe, H.S., Jang, H.G., and Whang, C.N., in Beam-Solid Interactions: Physical Phenomena, edited by Knapp, J.A., Borgesen, P., and Zuhr, R.A. (Mater. Res. Soc. Proc. 157 Boston, MA, 1989) pp. 4953.
5. Deal, B., J.Electrochem.Soc., 121. 198C (1974).
6. Goffaux, R. and Coelho, R., Rev.Gen.Electr., 78 619 (1969).
7. Sewell, F.A., Wegewer, H.A.R., and Lewis, E.T., Appl.Phys. Lett., 14, 45 (1969).
8. Terman, L.M., Solid-State Electr., 5, 285 (1962).
9. Berglund, C.N., IEEE Trans. on Electron Devices, ED-13, 701 (1966).
10. Gray, P.V. and Brown, D.M., Appl.Phys.Lett., 8, 31 (1966).
11. Nicollian, E.H. and Brews, J.R., MOS (Metal Oxide Semiconductor) Physics and Technology (Wiley, New York, 1982) p.161.
12. Brews, J.R., Solid-State Electron., 20, 607 (1977).
13. Hahn, B.R. and Yoon, D.Y., J. Appl. Phys., 65, 2766 (1989)

Electrical Properties Of Thin Polyimide Films Prepared By Ionized Cluster Beam Deposition

  • Hyung-Jin Jung (a1), Dong-Heon Lee (a1), Jeon-Kook Lee (a1) and Chung-Nam Whang (a2)

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