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Electrical Properties of PZT Prepared by Pulsed Laser Ablation on Various Electrodes

Published online by Cambridge University Press:  15 February 2011

Akiharu Morimoto ,
Yasuhiro Yamanaka  and
Toshiharu Minamikawa
Akiharu Morimoto
Affiliation:
Tatsuo Shimizu Department of Electrical and Computer Engineering, Faculty of Engineering, Kanazawa University, Kanazawa 920, Japan
Yasuhiro Yamanaka
Affiliation:
Tatsuo Shimizu Department of Electrical and Computer Engineering, Faculty of Engineering, Kanazawa University, Kanazawa 920, Japan
Toshiharu Minamikawa
Affiliation:
Tatsuo Shimizu Department of Electrical and Computer Engineering, Faculty of Engineering, Kanazawa University, Kanazawa 920, Japan
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Abstract

The effect of various electrodes on the ferroelectric properties of lead-zirconate-titanate (Pb(Zr0.52Ti0.48)O3 PZT) films through the film structure is presented. All the PZT films were deposited by pulsed laser ablation (PLA) using an ArF excimer laser. For electrode materials, YBa2Cu3O7 (YBCO) and Ni-alloy were deposited by pulsed laser ablation and sputtering, respectively. As a result various kinds of PZT films with various film structures were obtained. These experiments revealed that there is no simple correlation between the film structure and the fatigue resistance. The fatigue resistance is, however, found to be improved primarily by decreasing the switched-charge density, although the correlation shows some ambiguity. This suggests that the large polarization reversal accelerates the fatigue but there remained the possibility that the fatigue resistance is improved by the optimization of the film structure and film-substrate interface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 361: Symposium I2 – Ferroelectric Thin Films IV , 1994 , 551
Copyright
Copyright © Materials Research Society 1995

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References

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