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The Electrical Properties of Polyoxide Depending on the Polycrystalline-Si Formation Conditions

  • Kyoung-Soo Yi (a1), Deok-Ho Cho (a1), Jeong Yong Lee (a2), Kee-Soo Nam (a1), Sang-Won Kang (a1) and Jin-Hyo Lee (a1)...


Prior to growth of polyoxide, amorphous-Si with a cap of low temperature oxide was annealed to improve the dielectric property of polyoxide. Current-electric field, critical electric field, critical electric field histogram, and Fowler-Nordheim conduction plot were evaluated. The interface of polyoxide and poly-Si was observed with a transmission electron microscope. The annealing of the amorphous-Si prior to oxidation was effective to improve the dielectric property of the polyoxide.



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1. DiMaria, D. and Kerr, D., Appl. Phys. Lett. 27 (9), 505 (1975).
2. Anderson, R. and Kerr, D., J. Appl. Phys. 48 (11), 4834 (1977).10.1063/1.323510
3. Irene, E., Tierny, E., and Dong, D., J. Electrochem. Soc. 127 (3), 705 (1980).
4. Huff, H., Halvorson, R., Chiu, T., and Guterman, D., 127(11), 2482 (1980).10.1149/1.2129501
5. Sternheim, M., Kinsbron, E., Alspector, J., and Heimann, P., J. Electrochem. Soc. 130 (8), 1735 (1983).10.1149/1.2120072
6. Heimann, P., Murarka, S., and Sheng, T., J. Appl. Phys. 53(9), 6240 (1982).
7. Brown, D. and Barile, C., J. Electrochem. Soc. 130, 1597 (1983).10.1149/1.2120041
8. Marcus, R., Sheng, T., and Lin, P., J. Electrochem. Soc. 129, 1282 (1982).
9. Faraone, L., Vibronek, R., and McGinn, J., IEEE Trans. Electron Devices ED32, 577(1985).
10. Conti, M., Corda, G., and Gastaldi, R., in Insulating Films on Semiconductors, edited by Roberts, G.G. (Inst. of Physics J., 1980), pp. 5561.
11. Harbeke, G., Krausbauer, L., Steigmeir, E., Widmer, A., Kappert, H., and Neugebauer, G., RCA Rev. 44, 287(1983).
12. Duffy, M, McGinn, J., Shaw, J., Smith, R., Soltis, R., and Harbeke, G., J. Electrochem. Soc. 44., 313325 (1983).
13. Shinada, K., Mori, S., and Mikata, Y., J. Electrochem. Soc. 132 (9), 2185 (1988).
14. Lenzlinger, M. and Snow, E., J. Appl. Phys. 40, 278 (1969).10.1063/1.1657043
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