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Electrical Defect Analysis Following Pulsed Laserirradiation of Unimplanted GaAs*

  • D. Pribat (a1), S. Delage (a1), D. Dieumegard (a1), M. Croset (a1), P.C. Srivastava (a2) and J.C. Bourgoin (a2)...

Abstract

Current-voltage, capacitance-voltage and defect spectroscopy techniques are used to characterize the electrical properties of GaAs crystals after pulsed laser irradiation with either a Nd-YAG or a Ruby laser. I(V) and C(V) measurements performed in conjunction on Au/GaAs Schottky structures after laser irradiation at low energy density show an important barrier lowering, of the order of 300mV. Carrier compensation up to 6×lO16/cm3 is observed in a subsurface layer whose thickness increases with deposited laser energy density. D.L.T.S. is used to study the tail of laser induced defects behind the heavily compensated layer. Finally the results are compared to those obtained following conventional thermal treatment.

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Work partially supported by D.R.E.T.

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Electrical Defect Analysis Following Pulsed Laserirradiation of Unimplanted GaAs*

  • D. Pribat (a1), S. Delage (a1), D. Dieumegard (a1), M. Croset (a1), P.C. Srivastava (a2) and J.C. Bourgoin (a2)...

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