Skip to main content Accessibility help

Electrical Contacts to Vertically Oriented Silicon Nano and Microdevices for Applications in Flexible Systems

  • Mark Triplett (a1) (a2), Hideki Nishimura (a1) (a3), Matthew Ombaba (a1) and M. Saif Islam (a1)


Flexible devices utilizing crystalline semiconductor nano or microstructures materials are attractive for many applications. However, these materials are fabricated or grown in unusable forms for flexible systems due to their rigid crystalline mother substrates. We demonstrate a transfer printing technique for transferring vertical arrays of one-dimensional (1D) materials from mother substrates to flexible substrates with subsequent device fabrication steps to create flexible devices from these arrays. The transfer printing technique is based on vertical embossing of arrays of 1D materials into thermoplastic (Poly (methyl methacrylate) (PMMA)) transfer layers, while the device fabrication steps rely on encapsulation with insulating polymers and contact deposition. We investigated the use of flexible insulating layers like polydimethylsiloxane (PDMS) and polyurethane (PU) which are shown to be effective for encapsulation and contact isolation. Representative flexible resistive devices were created from these transferred arrays and insulating layers which showed a reversible tactile characteristic. Electronic characterization and flexibility testing was carried out to show the potential of these methods for enabling large-scale integrations of nano and microstructures into vertical and flexible packages.



Hide All
[1] Kim, D. H., Ahn, J. H., Choi, W. M., Kim, H. S., Kim, T. H., Song, J. Z., et al. ., “Stretchable and foldable silicon integrated circuits,” Science, vol. 320, pp. 507511, Apr 25 2008.
[2] Plass, K. E., Filler, M. A., Spurgeon, J. M., Kayes, B. M., Maldonado, S., Brunschwig, B. S., et al. ., “Flexible Polymer-Embedded Si Wire Arrays,” Advanced Materials, vol. 21, pp. 325328, Jan 19 2009.
[3] Weisse, J. M., Lee, C. H., Kim, D. R., and Zheng, X. L., “Fabrication of Flexible and Vertical Silicon Nanowire Electronics,” Nano Letters, vol. 12, pp. 33393343, Jun 2012.
[4] McAlpine, M. C., Ahmad, H., Wang, D. W., and Heath, J. R., “Highly ordered nanowire arrays on plastic substrates for ultrasensitive flexible chemical sensors,” Nature Materials, vol. 6, pp. 379384, May 2007.
[5] Chaudhry, A., Ramamurthi, V., Fong, E., and Islam, M. S., “Ultra-low contact resistance of epitaxially interfaced bridged silicon nanowires,” Nano Letters, vol. 7, pp. 15361541, Jun 2007.
[6] Lee, J. S., Islam, M. S., and Kim, S., “Direct formation of catalyst-free ZnO nanobridge devices on an etched Si substrate using a thermal evaporation method,” Nano Letters, vol. 6, pp. 14871490, Jul 12 2006.
[7] Logeeswaran, V. J., Katzenmeyer, A. M., and Islam, M. S., “Harvesting and Transferring Vertical Pillar Arrays of Single-Crystal Semiconductor Devices to Arbitrary Substrates,” Ieee Transactions on Electron Devices, vol. 57, pp. 18561864, Aug 2010.
[8] Ombaba, M. M., Logeeswaran, V. J., and Islam, M. S., “Electrically conducting film of silver sub-micron particles as mechanical and electrical interfaces for transfer printed micro- and nano-pillar devices,” Applied Physics a-Materials Science & Processing, vol. 111, pp. 251259, Apr 2013.
[9] Logeeswaran, V. J., Oh, J., Nayak, A. P., Katzenmeyer, A. M., Gilchrist, K. H., Grego, S., et al. ., “A Perspective on Nanowire Photodetectors: Current Status, Future Challenges, and Opportunities,” Ieee Journal of Selected Topics in Quantum Electronics, vol. 17, pp. 10021032, Jul-Aug 2011.
[10] Shiu, S. C., Hung, S. C., Chao, J. J., and Lin, C. F., “Massive transfer of vertically aligned Si nanowire array onto alien substrates and their characteristics,” Applied Surface Science, vol. 255, pp. 85668570, Jul 30 2009.


Electrical Contacts to Vertically Oriented Silicon Nano and Microdevices for Applications in Flexible Systems

  • Mark Triplett (a1) (a2), Hideki Nishimura (a1) (a3), Matthew Ombaba (a1) and M. Saif Islam (a1)


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed