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Electrical Conduction Mechanism of Highly Transparent and Conductive ZnO Thin Films

  • Tadatsugu Minami (a1), Shingo Suzuki (a1) and Toshihiro Miyata (a1)

Abstract

In this paper, we describe the underlying theory along with experiments concerning the electrical conductivity of transparent conducting ZnO films with a carrier concentration of 1019-1021 cm−3. The experimentally determined mobility as a function of carrier concentration in the range of 1019-1021 cm−3 could be quantitatively referenced to a theoretically calculated mobility that is dominated by not only grain boundary scattering but also ionized impurity scattering using the Brooks-Herring-Dingle theory with both degeneracy and nonparabolicity of the conduction band taken into account. Concerning nonparabolicity, the conduction band effective mass as a function of carrier concentration was theoretically analyzed and experimentally determined.

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Electrical Conduction Mechanism of Highly Transparent and Conductive ZnO Thin Films

  • Tadatsugu Minami (a1), Shingo Suzuki (a1) and Toshihiro Miyata (a1)

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