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Electrical Characterization of Passivation Processes in Si-GaAs by Isothermal Photoinduced Transient Measurements

  • R. Dkiouak (a1), J. Macia (a1), A. Perez-Rodriguez (a1), J. Gual (a1) and J.R. Morante (a2)...

Abstract

The analysis of SI-GaAs passivated with different plasma treatments by isothermal PITS measurements shows the ability of this technique for the characterization of the electrical effects of the surface treatments. PITS spectra show, in addition to a midgap level assigned to EL2, a non exponential peak which strongly depends on the passivation process. This is related to the generation of defects during the surface processing, likely through the presence of interaction processes involving mid-gap related levels. The comparison between the spectra with different passivation conditions suggests the presence of ionized species in the plasma treatment and the fast growth rate of the passivation layer to determine a higher generation of these process related defects.

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1. Balland, J.C., Zielinger, J.P., Noguet, C. and Tapiero, M., J. Phys. D: Appl. Phys. 19, 57 (1986).
2. Morante, J.R., Pérez-Rodríguez, A., Samitier, J. and Romano-Rodríguez, A., J. Appl. Phys. 70, 4202 (1991).
3. Friedel, P., Landesman, J.P., Boher, P. and Schneider, J., J. Vac. Sci. Technol. B 5, 1129 (1987).
4. Gual, J., Dkiouak, R., Samitier, J., Morante, J.R., Comet, A., Boher, P. and Renaud, M., Surf. Scien. 251/252, 195 (1991).
5. Makram-Ebeid, S. and Boher, P., Rev. Phys. Appl. 23, 847 (1988).
6. Gual, J., Dkiouak, R., Samitier, J., Morante, J.R., Boher, P. and Renaud, M., in Semii-insulating III-V Materials. Toronto 1990, edited by Milnes, A. and Milner, C.J. (Adam Hilger-IOPP, 1990), p. 439.

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Electrical Characterization of Passivation Processes in Si-GaAs by Isothermal Photoinduced Transient Measurements

  • R. Dkiouak (a1), J. Macia (a1), A. Perez-Rodriguez (a1), J. Gual (a1) and J.R. Morante (a2)...

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