Hostname: page-component-77c89778f8-m42fx Total loading time: 0 Render date: 2024-07-18T18:28:11.489Z Has data issue: false hasContentIssue false
  • English
  • Français

Elastic Properties and Stresses in Polyimide thin Films and Coatings

Published online by Cambridge University Press:  21 February 2011

Kapil C. Sheth ,
Michael Chen  and
Richard J. Farris
Kapil C. Sheth
Affiliation:
University of Massachusetts, Department of Polymer Science and Engineering, Amherst, MA 01003.
Michael Chen
Affiliation:
University of Massachusetts, Department of Polymer Science and Engineering, Amherst, MA 01003.
Richard J. Farris
Affiliation:
University of Massachusetts, Department of Polymer Science and Engineering, Amherst, MA 01003.
Get access

Abstract

Polyimide thin films and coatings (< 20μm) for electronic applications have been fully characterized. Analysis of residual stresses and determination of all 21 anisotropic constants are necessary for a better understanding of these coatings in complex geometries. The residual stresses have been measured by a real-time vibrational holographic interferometry technique. The number of elastic constants is reduced to 9 independent constants by finding the orthotopic axes. All the 9 orthotropic constants - 3 normal compliances, 3 shear compliances and 3 independent Poisson’s ratios - have been determined. Moisture diffusion constants have also been measured.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 356: Symposium B2 – Thin Films: Stresses and Mechanical Properties V , 1994 , 529
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Sroog, C.E., J.Polym.Sci., Macromol.Rev., 11, 161 (1976).Google Scholar
2. Bower, G.M. and Frost, L.W., J. Polym. Sci. A, 1, 313, (1963).Google Scholar
3. Goldsmith, C., Geldermans, P., Bedetti, F. and Walker, G.A., J. Vac. Sci. Technol. A 1(2), 407 (1983).Google Scholar
4. Feiring, A.E., Auman, B.C. and Wonchoba, E.R., Macromolecules, 26, 2779 (1993).Google Scholar
5. Shaffer, E.O. II, Townsend, P.H., Radler, M.J. and Carriere, C.J., Mat. Res. Soc. Symp. Proc, 239, 163 (1992).Google Scholar
6. Maden, M.A. and Farris, R.J., Exp. Mech., 31(2), 178 (1991).Google Scholar
7. Vrtis, J.K. and Farris, R.J., “Moisture Diffusion Coefficients of Polymer Films Using Real Time Vibrational Holographic Interferometry” (in preparation)Google Scholar
8. McCullough, R.L. in Micromechanical Materials Modeling vol. 2, Technomic Publishing (1992).Google Scholar
9. Sheth, K.C., Chen, M.J. and Farris, R.J. in Proceedings of the 5th International Conference on Polyimides by the Society of Plastics Engineers, Ellenville, NY, 1994. (to be published)Google Scholar
10. Bauer, C.L., Ph.D. Thesis, University of Massachusetts, Amherst, MA (1988).Google Scholar
11. Zoller, P., Bolli, P., Pahud, V. and Ackermann, H., Rev. Sci. Instrum., 47(8), 948 (1976).Google Scholar
12. Lekhnitskii, S.G.. Theory of Elasticity of an Anisotropic Body. MIR (1981).Google Scholar