Hostname: page-component-8448b6f56d-c47g7 Total loading time: 0 Render date: 2024-04-24T16:10:38.602Z Has data issue: false hasContentIssue false
  • English
  • Français

Elastic Constant Effect on the Critical Thickness of an Epilayer

Published online by Cambridge University Press:  21 February 2011

Tong-Yi Zhang
Tong-Yi Zhang*
Affiliation:
Department of Mechanical EngineeringHong Kong University of Science and TechnologyClear Water Bay, Kowloon, Hong Kong
Get access

Abstract

The effect of elastic constants on the critical thickness of an epilayer is investigated. The results indicate that the self energy of the dislocation is controlled by the soft phase between the epilayer and the substrate, while the interaction energy only depends on the elastic constants of the epilayer. It is easier for a dislocation to be formed if the substrate is softer than the epilayer, and consequently the critical thickness is smaller. On the other hand, a soft epilayer can have a large thickness without any mismatch dislocation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 356: Symposium B2 – Thin Films: Stresses and Mechanical Properties V , 1994 , 325
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Frank, F.C. and van der Merwe, J.H., Proc. Roy. Soc., A198, 205 (1949); Ibid., A198, 216 (1949); Ibid., A200, 125 (1949).Google Scholar
2. Matthews, J.W. and Blakeslee, A.E., J. Cryst. Growth, 27, 118 (1974).Google Scholar
3. Freund, L.B., Advances in Applied Mechanics, 30, 1 (1993).Google Scholar
4. Willis, J.R., Jain, S.C. and Bullough, R., Phil. Mag. A, 62, 115 (1990); Ibid., 64, 629 (1991).Google Scholar
5. Jain, S.C., Gosling, T.J., Willis, J.R., Totterdell, D.H.J., and Bullough, R., Phil. Mag. A, 65, 1151 (1992).Google Scholar
6. Gosling, T.J., Jain, S.C., Willis, J.R., Atkinson, A., and Bullough, R., Phil. Mag. A, 66, 119 (1992).Google Scholar
7. Zhang, T.Y., Hack, J.E. and Guido, L.J., J. Appl. Phys., 75, 2358 (1994); Ibid, 75, 2363 (1994).Google Scholar
8. Dodson, B.W., Appl. Phys. Lett., 51, 37 (1988).Google Scholar
9. Gosling, T.J. and Willis, J.R., Phil. Mag. A, 69, 65 (1994).Google Scholar
10. Zhang, T.Y. and Li, J.C.M., J. Appl. Phys., 70, 744 (1991); Ibid., 72, 2215 (1992).Google Scholar
11. Hirth, J.P. and Lothe, J., Theory of Dislocations, second edition, John Wiley & Son, New York (1982).Google Scholar