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The Effects of Surface and Interface Depletion Regions on the Photoconductivity of a-Si:H in Surface Cell Structures

  • GN Parsons (a1), C Kusano (a2) and G Lucovsky (a1)


We have studied the optical, electrical and photoelectronic properties of a-Si:H thin films in surface cell structures. We have concluded that upward band bending in the form of depletion layers at the film surface and film oxide glass interface causes the electrical properties to display a thickness dependence. We find that the measured values of the quantum efficiency, mobility, lifetime product, hereafter nuT, also displays a thickness dependence. We show how the limiting bulk values for nuT and other electronic properties can be determined.



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