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The Effects of Substrate Conditions on the Microstructural Evolution of Thin Diamond-Like Films

Published online by Cambridge University Press:  25 February 2011

J. J. Cuomo ,
J. Bruley ,
J. P. Doyle ,
D. L. Pappas ,
K. L. Saenger ,
J. C. Liu  and
P. E. Batson
J. J. Cuomo
Affiliation:
IBM Research Division, Thomas J. Watson Research Center, Yorktown Heights, N.Y. 10598
J. Bruley
Affiliation:
Now at Max-Planck-Institut für Metallforschung, Seestraße 92, 7000 Stuttgart 1, F.R. Germany
J. P. Doyle
Affiliation:
IBM Research Division, Thomas J. Watson Research Center, Yorktown Heights, N.Y. 10598
D. L. Pappas
Affiliation:
IBM Research Division, Thomas J. Watson Research Center, Yorktown Heights, N.Y. 10598
K. L. Saenger
Affiliation:
IBM Research Division, Thomas J. Watson Research Center, Yorktown Heights, N.Y. 10598
J. C. Liu
Affiliation:
IBM Research Division, Thomas J. Watson Research Center, Yorktown Heights, N.Y. 10598
P. E. Batson
Affiliation:
IBM Research Division, Thomas J. Watson Research Center, Yorktown Heights, N.Y. 10598
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Abstract

We report on a study of hard amorphous carbon thin films prepared by condensing streams of energetic carbon species, onto a range of substrates maintained at different temperatures. The carbon vapor is generated either by ion sputtering, laser ablation or e-beam evaporation. Spatially resolved electron-energy-loss spectra reveal variations in the films′ microstructure brought about by altering the deposition conditions. We estimate that the density of the different films varies between 2.0 and 3.26 g/cm3. We observe an evolution towards denser films upon increasing incident beam energy, reducing substrate temperature, and increasing substrate thermal conductivity. Low density films contain a predominance of trigonally bonded sp2-hybridized carbon (i.e graphitic carbon) and the highest density films contain a high fraction (∽ 80%) of tetr-ahedral sp3-bonded carbon (i.e. diamond-like).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 202: Symposium C – Evolution of Thin Film and Surface Microstructure , 1990 , 247
Copyright
Copyright © Materials Research Society 1991

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References

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