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Effects of Substrate Bias Voltages on Preparation of YBa2Cu3O7-δ Thin Films by Laser Ablation

Published online by Cambridge University Press:  16 February 2011

K. Ohata ,
H. Izumi ,
T. Hase ,
K. Suzuki ,
T. Morishita  and
S. Tanaka
K. Ohata
Affiliation:
Superconductivity Research Laboratory, ISTEC, 10-13, Shinonome 1-chome, Koto-ku, Tokyo, 135, Japan
H. Izumi
Affiliation:
Superconductivity Research Laboratory, ISTEC, 10-13, Shinonome 1-chome, Koto-ku, Tokyo, 135, Japan
T. Hase
Affiliation:
Superconductivity Research Laboratory, ISTEC, 10-13, Shinonome 1-chome, Koto-ku, Tokyo, 135, Japan
K. Suzuki
Affiliation:
Superconductivity Research Laboratory, ISTEC, 10-13, Shinonome 1-chome, Koto-ku, Tokyo, 135, Japan
T. Morishita
Affiliation:
Superconductivity Research Laboratory, ISTEC, 10-13, Shinonome 1-chome, Koto-ku, Tokyo, 135, Japan
S. Tanaka
Affiliation:
Superconductivity Research Laboratory, ISTEC, 10-13, Shinonome 1-chome, Koto-ku, Tokyo, 135, Japan
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Abstract

Superconducting films of YBa2Cu3O7-δ have been fabricated by pulsed laser deposition technique applying bias voltage to a substrate up to +/-500 V. It has been found that substrate bias voltages are effective for preparing the fidms with high Tc and high crystalline quality at lower substrate temperatures. Positive bias is more effective than negative one. Time resolved observation has been carried out in order to investigate the influence of biasing on the plume and revealed three kinds of light emission. The first is an ordinary plume with a velocity of 6×105 cm/s, which is independent of biasing. It suggests that most of the luminous particles in the plume are electrically neutral. The second is oxygen plasma with a short life time, which is triggered by laser pulse under the positive bias and triggered by arrival of the plume in 8 ps after the laser pulse under the negative bias. The third is an additional plume with a velocity of 3×105 cm/s. The oxygen plasma and additional plume have improved superconducting properties of films deposited with biasing to the substrate.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 191: Symposium N – Laser Ablation for Materials Synthesis , 1990 , 183
Copyright
Copyright © Materials Research Society 1990

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References

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