Skip to main content Accessibility help
×
Home

Effects of Rapid Thermal Annealing on Heavily Boron Doped Silicon Epitaxial Layers

  • Jianbao Wang (a1), Qiang Xu (a1), Fang Lu (a1), Henghui Sun (a1) and Xun Wang (a1)...

Abstract

The effects of rapid thermal annealing (RTA) on the electrical properties and the strain relaxation of the heavily boron doped silicon layers grown by molecular beam epitaxy have been studied by Hall effect measurements and double crystal x-ray diffraction. After the RTA treatment at temperatures above 1000°C, the increases of both carrier concentration and Hall mobility as well as the improvement of crystalline quality of epitaxial layers are acheived. It is verified that the lattice mismatch between the epitaxial layer and the Si substrate is proportional to the concentration of the substitutional boron rather than the total boron concentration. The lattice contraction coefficient ² is determined to be 5.3 (in units 10-24cm3) in the carrier concentration range of 0.75∼ 3×1020cnr-3.

Copyright

References

Hide All
1. Larson, B.C., While, C.W. and Appleton, B.R., Appl. Phys. Lett. 32, 801 (1978).
2. Yukota, J., J Phys. Soc. Jpn. 19, 1487 (1964).
3. Baribeau, J.M. and Rolfe, S.J., Appl. Phys. Lett. 58, 2129 (1991).
4. Jackman, T.E., Houghton, D.C., Jackman, J.A., Denhoff, M.W., Kechang, S., McCaffrey, J., and Rockett, A., J. Appl. Phys. 66, 1984 (1989)
5. Brown, G.T., Barnett, S.J., Blackmore, G.W., Courtney, S.J., and Houghton, D.C., Mat. Res. Soc. Symp. Proc. 102, 289 (1988).
6. Xu, Q., Yuan, J., Wang, J.B., Huang, D.M., Lu, F., Sun, H.H., Wang, X., and Liu, R., J. Appl. Phys. 76, 1697 (1994).
7. Cargill, G.S. III, Angilello, J., and Kavanagh, K.L., Phys. Rev. Lett. 61, 1748 (1988).
8. Horn, F.H., Phys. Rev. 97, 1521 (1955).
9. McQuhae, K.G. and Brown, A.S., Solid-State Electron. 15, 259 (1972).
10. Herzog, H.J., sepregi, L.C., and Seidel, H., J. Electrochem. Soc. 131, 2969 (1984).

Related content

Powered by UNSILO

Effects of Rapid Thermal Annealing on Heavily Boron Doped Silicon Epitaxial Layers

  • Jianbao Wang (a1), Qiang Xu (a1), Fang Lu (a1), Henghui Sun (a1) and Xun Wang (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.