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Effects of Processing Parameters on the Excimer Laser Deposition of Yba2Cu3O7-δ Thin Films

  • R. E. Muenchausen (a1), X. D. Wu (a2), R. C. Dye (a1), K. M. Hubbard (a1), R. C. Estler (a1), C. Flamme (a1), R. Brainard (a1), S. Foltyn (a1), J. Tesmer (a1), M. Maley (a1), J. Martin (a1) and N. S. Nogar (a1)...

Abstract

Systematic studies of the effects of pulsed laser deposition processing parameters on plume dynamics and resultant film properties have been performed. Plume angular distributions, cosm(θ), were observed to be variable between 1 > m > 15 depending on laser energy density and spot size. Under optimized conditions, epitaxial, superconducting thin films could be grown in‐situ on a variety of single‐crystal substrates. High quality, 2000 Å  ss thick films were obtained at deposition rates approaching 150 Å/sec.

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1 Cheung, J. T., Sankur, H., “Growth of Thin Films by Laser‐Induced Evaporation” CRC Crit. Rev. Sol. St. Mater. Sci. 15, 63 (1988).
2 Estler, R. C., Foltyn, S., Garcia, A. R., Muenchausen, R. E., Nogar, N. S., Trkula, M. , “Laser Deposition of High‐Temperature Superconducting Thin Films”, Advanced Materials and Manufacturing Processes, in press.
3 Muenchausen, R. E., Hubbard, K. M., Foltyn, S., Jenkins, C., Estler, R. C., and Nogar, N. S., “Effect of Deposition Rate on Properties of YBa2Cu307‐5Superconducting Thin Films”, Appl. Phys. Lett., submitted.
4 Kelly, R. and Dreyfus, R. W.,“On the Effect of Knudsen‐Layer Formation on Studies of Vaporization, Sputtering and Desorption”, Surf. Sci. 198, 263 (1988); R. Kelly and R. W. Dreyfus, “Reconsidering the Mechanisms of Laser Sputtering with Knudsen‐Layer Formation Taken into Account”, Nucl. Inst. Meth. Phys. Res. B32., 341 (1988); R. Kelly, “Thermal Sputtering as a Gasdynamic Process”, Nucl. Inst. Meth. Phys. Res. B, in press
5 Wu, X. D., Muenchausen, R. E., Foltyn, S., Estler, R. C., Dye, R. C., Flamme, C., Nogar, N. S., Garcia, A. R., Martin, J. A., Tesmer, J. R., “Effect of Deposition Rate on Properties of YBa2Cu3O7‐5 Superconducting Thin Films” Appl. Phys. Lett., submitted.

Effects of Processing Parameters on the Excimer Laser Deposition of Yba2Cu3O7-δ Thin Films

  • R. E. Muenchausen (a1), X. D. Wu (a2), R. C. Dye (a1), K. M. Hubbard (a1), R. C. Estler (a1), C. Flamme (a1), R. Brainard (a1), S. Foltyn (a1), J. Tesmer (a1), M. Maley (a1), J. Martin (a1) and N. S. Nogar (a1)...

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