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Effects of morphology of buffer layers on ZnO/sapphire heteroepitaxial growth by RF magnetron sputtering

  • Tomoaki Ide (a1), Koichi Matsushima (a1), Ryota Shimizu (a1), Daisuke Yamashita (a1), Hynwoong Seo (a1), Kazunori Koga (a1), Masaharu Shiratani (a1) and Naho Itagaki (a1) (a2)...

Abstract

Effects of surface morphology of buffer layers on ZnO/sapphire heteroepitaxial growth have been investigated by means of “nitrogen mediated crystallization (NMC) method”, where the crystal nucleation and growth are controlled by absorbed nitrogen atoms. We found a strong correlation between the height distribution profile of NMC-ZnO buffer layers and the crystal quality of ZnO films. On the buffer layer with a sharp peak in height distribution, a single-crystalline ZnO film with atomically-flat surface was grown. Our results indicate that homogeneous and high-density nucleation at the initial growth stages is critical in heteroepitaxy of ZnO on lattice mismatched substrates.

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1. Hwang, D. K., Kang, S. H., Lim, J. H., Yang, E. J., Oh, J. Y., Yang, J. H., and Parket, S. J., Appl. Phys. Lett. 86, 222101 (2005).
2. Nakahara, K., Akasaka, S., Yuji, H., Tamura, K., Fujii, T., Nishimoto, Y., Takamizu, D., Sasaki, A., Tanabe, T., Takasu, H., Amaike, H., Onuma, T., Chichibu, S. F., Tsukazaki, A., Ohtomo, A., and Kawasaki, M., Appl. Phys. Lett. 97, 013501 (2010).
3. Guo, X. L., Choi, J. H., Tabata, H. and Kawai, T., Jpn. J. Appl. Phy. 40, 177 (2001).
4. Lim, J. H., Kang, C. K., Kim, K. K., Park, I. K., Hwang, D. K., and Park, S. J., Adv. Mater. 18, 2720 (2006).
5. Vispute, R. D., Talyansky, V., Trajanovic, Z., Choopun, S., Downes, M., Sharma, R. P., Venkatesan, T., Woods, M. C., Lareau, R. T., Jones, K. A., and Iliadis, A. A., Appl. Phys. Lett. 70, 2735 (1997).
6. Coleman, V. A., Bradby, J. E., Jagadish, C., Munroe, P., Heo, Y. W., Pearton, S. J., Norton, D. P., Inoue, M., and Yano, M., Appl. Phys. Lett. 86, 2013105 (2005)
7. Nakamura, T., Yamada, Y., Kusumori, T., Minoura, H., and Muto, H., Thin Solid Films 411, 6064 (2002).
8. Yan, J. F., Lu, Y. M., Liu, Y. C., Lianga, H. W., Li, B. H., Shen, D. Z., Zhang, J. Y., and Fan, X. W., J. Cryst. Growth 266, 505 (2004).
9. Akasaki, I., Amano, H., Koide, Y., Hiramatshu, K., and Sawai, N., J. Cryst. Growth 98, 209219 (1989).
10. Itagaki, N., Kuwahara, K., Matsushima, K., Yamashita, D., Seo, H., Koga, K., and Shiratani, M., Opt. Eng. 53, 087109 (2014).
11. Itagaki, N., Kuwahara, K., Nakahara, K., Yamashita, D., Uchida, G., Koga, K., and Shiratani, M., Appl. Phys. Express 4, 011101 (2011).
12. Kuwahara, K., Itagaki, N., Nakahara, K., Yamashita, D., Uchida, G., Kamataki, K., Koga, K., and Shiratani, M., Thin Solid Films 520, 4674 (2012).
13. Suhariadi, I., Oshikawa, K., Kuwahara, K., Matsushima, K., Yamashita, D., Uchida, G., Koga, K., Shiratani, M., and Itagaki, N., Jpn. J. Appl. Phys. 52, 11NB03 (2013).
14. Jung, Y. S., No, Y. S., Kim, J. S., and Choi, W. K., J. Cryst. Growth 267, 85 (2004).
15. Yamada, T., Miyake, A., Kishimoto, S., Makino, H., Yamamoto, N., and Yamamoto, T., Surf. Coat. Tech. 202, 973 (2007).
16. Wu, H. Z., He, K. M., Qiu, D. J., and Huang, D. M., J. Cryst. Growth 217, 131137 (2000).
17. Williamson, G. K., and Hall, W. H., Acta Metallurgica 1, 22 (1953).

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