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Effects of Excimer Laser Ablation on the Surface of Hexagonal Boron Nitride

  • G. L. Doll (a1), T. A. Perry (a1) and J. A. Sell (a1)

Abstract

The laser-induced changes in the hexagonal boron nitride targets that are used in the deposition of pulsed laser-deposited cubic boron nitride films are examined. Although the structure of the hexagonal boron nitride in the irradiated areas is unaltered, the surface morphology changes considerably. Boron-rich spheroids were found to cover the irradiated area. Their origin is consistent with the hydrodynamic sputtering of the hexagonal boron nitride targets, and a liberation of nitrogen atoms to the gas phase.

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Effects of Excimer Laser Ablation on the Surface of Hexagonal Boron Nitride

  • G. L. Doll (a1), T. A. Perry (a1) and J. A. Sell (a1)

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