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Effects of Curing Time on Properties of Spin-On Glass as Low-Temperature Insulator

  • Miguel A. Dominguez (a1), Pedro Rosales (a1), Alfonso Torres (a1) and Mario Moreno (a1)

Abstract

In this work, we report the effects of curing time on properties of SiO2 films produced from Spin-On Glass (SOG) diluted with H2O and cured at 200°C. The electrical characterization showed that the insulator breakdown field for the films produced from SOG diluted with H2O with 1 Hr of curing time was approximately 5 MV/cm while for 6.5 Hrs of curing time the breakdown field was 21 MV/cm. Also, the refractive index and surface roughness were improved with longer curing time.

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