A fully coupled thermo-mechanical finite element model was used to study the buildup of stresses during splat solidification, and to understand the effect of deposition conditions on crack formation during plasma spray deposition. Through the simulation, the locations and magnitudes of maximum stresses were identified, where crack formation would presumably initiate. The model showed that the stresses scaled with the temperature difference between the superheated splat and the substrate. The simulation further showed that the stresses scale with the three geometric parameters, and two independent geometric ratios were defined; ζ (defined as t/λ) and ψ (defined as A/λ). 2D maps of maximum S 11 and S 22 under different combinations of ζ and ψ were constructed. The mappings showed that only roughness features on the scale of splat thickness were important in providing locations of maximum stress concentration.