Skip to main content Accessibility help
×
Home

Effect of Post Exposed Hydrogen on Chemisorbed Ethylene on Si(100)-(2×l)

  • Wolf Widdra (a1), Chen Huang and W. Henry Weinberg (a1)

Abstract

The effect of post adsorbed atomic hydrogen on the adsorption, desorption, and decomposition of ethylene on Si(100)-(2×l) has been studied using high-resolution electron energy loss spectroscopy (HREELS), temperature programmed desorption (TPD), and low-energy electron diffraction (LEED). Exposures to atomic hydrogen of more than 1015 atoms/cm2 convert the initial (2×l) reconstruction of sp3-hybridized, di-σ bonded ethylene to a (l×l) structure. Furthermore, after post exposure to atomic hydrogen, the thermal desorption peak of molecular ethylene is shifted up by approximately 100 K and reduced in intensity. HREEL spectra for deuterated ethylene show the formation of a C-H bond after exposure to atomic hydrogen, whereas the C-C bond remains intact. We explain our data by an atomic hydrogen-driven conversion of the di-σ bonded ethylene to a mono-σ bonded surface ethyl. Thermal activation after post exposure to atomic hydrogen leads to decomposition of about 60% of the initial ethylene in contrast to the observed molecular desorption in the absence of hydrogen.

Copyright

References

Hide All
[1] Cheng, C.C., Taylor, P.A., Wallace, R.M., Gutleben, H., Clemen, L., Colaianni, M.L., Chen, P.J., Weinberg, W.H., Choyke, W.J., and Yates, J.T. Jr., Thin Solid Films 225, 196 (1993).
[2] Taylor, P.A., Bozack, M.J., Choyke, W.J., and Yates, J.T. Jr., J.Appl.Phys. 65, 1099 (1989).
[3] Yoshinobu, J., Tsuda, H., Onchi, M., and Nishijima, M., J. Chem. Phys. 87,7332 (1987).
[4] Nishijima, M., Yoshinobu, J., Tsuda, H., and Onchi, M., Surf. Sci. 192, 383 (1987).
[5] Huang, C., Widdra, W., Wang, X.-S., and Weinberg, W.H., J. Vac. Sci. Technol. A 11, 2250 (1993).
[6] Huang, C., Widdra, W., and Weinberg, W.H., Surf. Sci. Lett. (submitted).
[7] Clemen, L., Wallace, R.M., Taylor, P.A., Dresser, M.J., Choyke, W.J., Weinberg, W.H., and Yates, J.T. Jr., Surf. Sci. 268, 205 (1992).
[8] Taylor, P.A., Wallace, R.M., Cheng, C.-C., Dresser, M.J., Choyke, W.J., Weinberg, W.H., and Yates, J.T. Jr., J. Am. Chem. Soc. 114,6754 (1992).
[9] Bozack, M.J., Choyke, W.J., Muehlhoff, L., and Yates, J.T. Jr., J. Appl. Phys. 60, 3750 (1986).
[10] Bozack, M.J., Taylor, P.A., Choyke, W.J., and Yates, J.T. Jr., Surf. Sci. 179, 132 (1987).
[11] Wang, X.-S. et al. , J. Vac. Sci. Technol. A (in press).
[12] Anderson, D.R., in Analysis of Silicones, Smith, A.L., Ed. (John Wiley, New York, 1978) p.247.
[13] Widdra, W., Huang, C., and Weinberg, W.H. (in preparation).
[14] Rueter, M.A. and Vohs, J.M., Surf. Sci. 262,42 (1992).
[15] Cheng, C.C., Lucas, S.R., Gutleben, H., Choyke, W.J., and Yates, J.T. Jr., Surf. Sci. Lett. 273,441 (1992).

Effect of Post Exposed Hydrogen on Chemisorbed Ethylene on Si(100)-(2×l)

  • Wolf Widdra (a1), Chen Huang and W. Henry Weinberg (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed