Skip to main content Accessibility help

Effect of piezoelectric vibration on electrical properties of YSZ film prepared by MOCVD

  • Hiroshi Masumoto (a1) and Takashi Goto (a1)


To improve electric properties of ion-conductors at low temperatures, ion-conducting/piezoelectric multifunctional film was prepared. Yttria-stabilized zirconia (YSZ) film as an ion-conducting film was deposited on a MgO substrate by metal-organic chemical vapor deposition (MOCVD). The significant [100] preferred orientation of cubic-YSZ single-phase film c ontaining 8 mol%Y2O3 was obtained at a deposition temperature of 973 K. The film consisted of fine grains of about 400 nm in diameter and had a columnar structure. It was capable of ionic conduction, as shown by the fact that a semicircle and a spike appeared at high and low frequencies, respectively, in the complex impedance measurement. The obtained YSZ thin film was placed on a multilayer piezoelectric actuator composed of seven sheets of a PZT (lead zirconate titanate) system. The effect of piezoelectric vibration on the electric properties of the ion-conducting film was investigated. The impedance value of the YSZ thin film decreased with increasing amplitude of piezoelectric vibration. The electrical conductivity of the YSZ thin film at 353 K, with an applied vibration frequency of 115 kHz and a voltage of 40 V, was about 2×10-4 Sm-1. The value of this conductivity was 103 times greater than that without vibration. Vibration by the actuator was thus suggested to improve the ionic conduction of the YSZ thin film.



Hide All
1. Nakazawa, M., Asada, A. and Osanai, H., IEEE Denshi Tokyo 23, 155157 (1984).
2. Inoue, T., Seki, N., Eguchi, K. and Arai, H., J. Electrochem. Soc. 137, 25232527 (1990).10.1149/1.2086980
3. Badwal, S. J. S., J. Electroanal. Chem. 146, 425429 (1983).10.1016/S0022-0728(83)80602-0
4. Heyne, L., Measurement of Oxygen, (North Holland, Pub. Co., 1976) pp. 6569.
5. Asada, A., Isono, Y., Nakasawa, M., Proc. 4th Sensor Symposium, (The Institute of Electrical Engineers of Japan, 1984), pp. 285292.
6. Saji, K., Takahashi, H., Kondo, H., Takeuchi, T. and Igarashi, I., Proc. 4th Sensor Symposium, (The Institute of Electrical Engineers of Japan, 1984) pp. 147151.
7. Yamamura, H., Utsunomiya, N., Mori, T. and Atake, T., Solid State Ionics 107, 185189 (1998).10.1016/S0167-2738(97)00534-1
8. Suzuki, K., Kubo, M., Oumi, Y., Miura, R., Takabe, H., Fahmi, A., Chatterjee, A., Teraishi, K. and Miyamoto, A., Appl. Phys. Lett. 73, 15021504 (1998).10.1063/1.122186
9. Thiele, E. S., Wang, L. S., Mason, T. O. and Barnett, S. A., J. Vac. Sci. Technol. A 9, 30543060 (1991).10.1116/1.577172
10. Sakurai, C., Fukui, T. and Okuyama, M., J. Am. Ceram. Soc. 76, 10611064 (1993).10.1111/j.1151-2916.1993.tb05337.x
11. Filal, M., Petot, C., Mokchah, M., Chateau, C. and Carpentier, J. L., Solid State Ionics 80, 2735 (1995).10.1016/0167-2738(95)00137-U
12. Garcia, G., Figueras, A., Casado, J., Llibre, J., Mokchah, M., Petot-Ervas, G. and Calderer, J., Thin Solid Films 317, 241244 (1998).10.1016/S0040-6090(97)00622-6
13. Nakagawa, K., Yoshioka, H., Kuroda, H., and Ishida, M., Solid State Ionics 35, 249255 (1989).10.1016/0167-2738(89)90304-4
14. Savvides, N. and Window, B., J. Vac. Sci. Technol. 4, 504508 (1986).10.1116/1.573869


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed