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Effect of piezoelectric vibration on electrical properties of YSZ film prepared by MOCVD

Published online by Cambridge University Press:  01 February 2011

Hiroshi Masumoto  and
Takashi Goto
Hiroshi Masumoto
Affiliation:
Institute for Materials Research, Tohoku University, Sendai 980–8577, JAPAN
Takashi Goto
Affiliation:
Institute for Materials Research, Tohoku University, Sendai 980–8577, JAPAN
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Abstract

To improve electric properties of ion-conductors at low temperatures, ion-conducting/piezoelectric multifunctional film was prepared. Yttria-stabilized zirconia (YSZ) film as an ion-conducting film was deposited on a MgO substrate by metal-organic chemical vapor deposition (MOCVD). The significant [100] preferred orientation of cubic-YSZ single-phase film c ontaining 8 mol%Y2O3 was obtained at a deposition temperature of 973 K. The film consisted of fine grains of about 400 nm in diameter and had a columnar structure. It was capable of ionic conduction, as shown by the fact that a semicircle and a spike appeared at high and low frequencies, respectively, in the complex impedance measurement. The obtained YSZ thin film was placed on a multilayer piezoelectric actuator composed of seven sheets of a PZT (lead zirconate titanate) system. The effect of piezoelectric vibration on the electric properties of the ion-conducting film was investigated. The impedance value of the YSZ thin film decreased with increasing amplitude of piezoelectric vibration. The electrical conductivity of the YSZ thin film at 353 K, with an applied vibration frequency of 115 kHz and a voltage of 40 V, was about 2×10-4 Sm-1. The value of this conductivity was 103 times greater than that without vibration. Vibration by the actuator was thus suggested to improve the ionic conduction of the YSZ thin film.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 785: Symposium D – Materials and Devices for Smart Systems , 2003 , D4.3
Copyright
Copyright © Materials Research Society 2004

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