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The Effect of Patterned vs. Unpatterned Acoustic Bragg Reflector on Barium Strontium Titanate Solidly Mounted Resonator

  • George N. Saddik (a1) and Robert A. York (a1)

Abstract

Barium strontium titanate solidly mounted resonators were fabricated with patterned and unpatterned acoustic Bragg reflectors on a sapphire substrate. The patterned and unpatterned solidly mounted resonator devices had acoustic Bragg reflectors consisting of Pt/SiO2/Pt/SiO2. The s-parameters of both devices were measured. The results showed that the quality factor increased for the device with the patterned acoustic Bragg reflector structure. The quality factors for the devices with patterned and unpatterned acoustic Bragg reflector structures were 54 and 115 and 28 and 86, respectively at the resonant and antiresonant frequencies. This investigation shows how an unpatterened acoustic Bragg reflector can contribute to the degradation of the overall quality factor of the device.

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References

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Keywords

The Effect of Patterned vs. Unpatterned Acoustic Bragg Reflector on Barium Strontium Titanate Solidly Mounted Resonator

  • George N. Saddik (a1) and Robert A. York (a1)

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