Skip to main content Accessibility help
×
Home

Effect of Low Energy Implantation on the Properties of Ti/Ni/Au Contacts to n-SiC

  • Patrick W Leech (a1), Anthony S Holland (a1), Geoffrey K Reeves (a1), Yue Pan (a1), Mark Ridgway (a2) and Phillip Tanner (a3)...

Abstract

The effect of low energy implantation of P or C ions in 3C-SiC on the properties of Ti/Ni/Au contacts has been examined for doses in the range 1013-1015 ions/cm2. Measurements of specific contact resistance, ρc, were performed using the two-contact circular test structure. The magnitude of ρc for the Ti/Ni/Au contacts on unimplanted SiC was 1.29 x 10−6 Ω.cm2. The value of ρc increased significantly at an implant dose of 1 x 1015 ions/cm2. The dependence of ρc on ion dose has been measured using both C and P implant species.

Copyright

References

Hide All
1. Lu, W., Collins, W.E., Mitchel, W.C. in SiC Power Materials, Springer, Ed. Chen, Z.C. (2004).
2. Leiten, R. R. et al. ., Appl. Phys. Lett., 92, 022106 (2008).
3. Hui, G., Yi-Men, Z., Yu-Ming, Z., Chinese Physics, 15(9), 2142 (2006).
4. Liu, F., Li, C.H., Pisano, A.P., Carraro, C., Maboudia, R., JVSTA, A28, 1259 (2010).
5. Grodzicki, M., Chrzanowski, J., Mazur, P., Zuber, S., Ciszewski, A., Optica Applicata, 39(4), 765 (2009).
6. Wang, L., Dimitrijev, S., Han, J., Iocopi, F., Hold, L., Tanner, P., Harrison, H.B., Thin Solid Films, 519 6443 (2011).
7. Pan, Y., Reeves, G. K., Leech, P. W., Holland, A. S., IEEE Trans. Electron Devices, 60, 1202, (2013).
8. Song, X., Biscarrat, J., Michaud, J-F., Cayrel, F., Zielinksi, M., Chassagne, T., Portail, M., E, Collard, Alquier, D., Nucl. Instr. Meth. Phys. Res. B269 2020 (2011).
9. Chunjuan, L., Su, L., Jingjing, F., Rong, W., Journal of Semiconductors, 33(3) 036002–1 (2012).
10. Takeda, T., Tomita, A., Matsui, T., Isshiki, T., Materials Science Forum, 778780, 350 (2014).

Keywords

Effect of Low Energy Implantation on the Properties of Ti/Ni/Au Contacts to n-SiC

  • Patrick W Leech (a1), Anthony S Holland (a1), Geoffrey K Reeves (a1), Yue Pan (a1), Mark Ridgway (a2) and Phillip Tanner (a3)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed