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The Effect of Intrinsic Passivation Stress on Stress in Encapsulated Interconnect Lines

  • Anne Sauter Mack (a1) and Paul Flinn (a1)


The stress in an encapsulated metal line has been calculated using the finite element technique for two passivation stress conditions. It is found that the stress-state in the passivation has a negligible effect on the stress in the metal line. The dominant factors affecting metal line stress are the passivation temperature, the thermal expansion coefficient difference between the metal line and the substrate, and the passivation modulus.



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