Skip to main content Accessibility help

Effect of Hot Water Exposure on Bare Silicon Surfaces in Mos Processing

  • J. H. Eisenberg (a1), S. F. Shive (a1), F. Stevie (a1), G. S. Higashi (a2), T. Boone (a2), K. Hanson (a2), J. B. Sapjeta (a2), G. N. Dibello (a3) and K. L. Fulford (a3)...


The use of hot water immersion to aid in the drying of wafers subsequent to liquid chemical processing has recently been increasing. Both the TREBOR HydrodryTM and the Isopropyl Alcohol (IPA) dry used by CFM Technologies Inc. use water rinses at elevated temperature. These treatments are of particular concern when they follow HF immersions where surface oxides are removed and bare silicon surfaces are exposed to the hot water. Studies by Watanabe et al.1 show that Si(l 11) facets can be produced by hot water immersion. This, in turn, implies that hot water etches silicon with an anisotropic etch rate. In this work, the etching of oxide patterned Si(100) wafers by immersion in hot water is studied. Etching is clearly observed in images produced by Transmission Electron Microscopy (TEM) with a concomitant increase in surface roughness. The rate of etching varies dramatically with the dissolved oxygen concentration of the water used. Possible mechanisms to explain the etching will be discussed.



Hide All
1. Watanabe, S., Nakayama, N., and Ito, T., Appl. Phys. Lett. 59, 1458 (1991).
2. Kern, W., J. Electrochem. Soc. 137 (1990) 1887
3. Heyns, M., Hasenack, C., Keersmaeker, R. De, and Falster, R., Microelectronic Engineering, 10, 235 (1991).
4. Heyns, M., Hasenack, C., Keersmaecker, R. De, and Falster, R., Proc. of the 1st Int. Symp. on Cleaning Technology in Semiconductor Device Manufacturing, Fall ECS 1989, ed. by Ruzyllo, J and Novak, R. E., PV 90–9, 293 (1990) (Electrochemical Society, Pennington, NJ, 1990).
5. Mishima, H., Yasui, T., Mizuniwa, T., Abe, M., and Ohmi, T., IEEE Trans. Of Semiconductor Manufacturing, 2, 69 (1989).
6. Trucks, G. W., Raghavachari, K., Higashi, G. S., and Chabal, Y. J., Phys. Rev. Lett., 65, 504 (1990).


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed