The fracture behavior of the Au(Cr)/PMDA-ODA interface was investigated using a stretch deformation method. The study has been focused on thc effects of metal dimension on the delamination behavior, the fracture morphology, and energy dissipation rate of the interface. The delamination behavior shows complex geometrical dependence, with changes observed in the magnitude of strain at failure as well as the progression of the fracture process. The fracture morphology and energy dissipation rate also show apparent dependence on the metal dimensions. The crack growth, as examined by the rate of energy dissipation, seems to consist of thrce stages: crack initiation, crack growth and post growth. Only the growth region exhibits a constant dissipation rate and the fracture energy determined in this stage is in good agreement with that obtained from energy balance. These results can be attributed to the change in the mechanical coupling between the metal and the polymer layers, which was evaluated using a finite element analysis with plastic deformation taken into aiccount.