Skip to main content Accessibility help
×
Home

Effect of Cu Migration in a Field Induced Dielectric Failure

  • Sang-Soo Hwang (a1), Sung-Yup Jung (a2) and Young-Chang Joo (a3)

Abstract

For the study of dielectric failures by Cu migration, TDDB (time dependent dielectric breakdown) and 1-D FDM simulation was carried out. We tested TDDB using a simple MIS structure with no barrier Cu electrode. From our TDDB results, the TTF's in the acceleration condition and the characteristic parameter of TDDB were obtained. In the simulation parts, 1-D FDM simulation was accomplished considering space charge effect due to Cu ions.

The objective of TDDB is to predict of TTF (time to failure) in the service condition form the results of an accelerating condition. The characteristic of TTF's follows E model in the accelerating condition, in the service condition, the deviation from E model was observed. This different characteristic of TTF can be explained by the mechanism of Cu migration enhanced by an applied E field. Our simulation and TDDB results reveal that the deviation from E model does not mean the change of failure mechanism, but it shows the characteristics of Cu migration.

Copyright

References

Hide All
1 Suñé, J., IEEE Elec. Dev. Lett. 22 296 (2001)
2 McPherson, J. W., Reddy, V. K., and Mogul, H. C., Appl. Phys. Lett. 71, 1101 (1997).
3 Tomita, T., Utsunomiya, H., Kamakura, Y., and Taniguchi, K., Appl. Phys. Lett. 71, 3664 (1997).
4 McBrayer, J. D., Ph. D. thesis, Stanford University (1983).
5 Wu, W., Duan, X. and Yuan, J. S., 41st IRPS 2003, p. 282.
6 Chen, F., Bravo, O., Chanda, K., McLaughlin, P., Sullivan, T., Grill, J., Lloyd, J., Kontra, R., and Aitken, J., 44th IRPS 2006, p. 46.
7 Kwon, J. –Y., Kim, K. –Su, Joo, Y. -C., and Kim, K. –B, Japanese J. Appl. Phys. 41 L99 (2002).

Keywords

Effect of Cu Migration in a Field Induced Dielectric Failure

  • Sang-Soo Hwang (a1), Sung-Yup Jung (a2) and Young-Chang Joo (a3)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed