Skip to main content Accessibility help
×
Home

Effect of a thin Ta layer on the C49-C54 transition.

  • F. La Via (a1), F. Mammoliti (a2), M.G. Grimaldi (a2), S. Quilici (a3) and F. Meinardi (a3)...

Abstract

The effect of a thin Ta layer at the Ti/Si interface on the kinetic of the C49-C54 transition will be shown in detail. The transformation kinetic has been monitored by in situ sheet resistance measurements that, coupled to structural characterisation, allowed to evidence the presence of an intermediate phase before the C54 formation. The temperature of the C54 phase formation decreases with a Ta concentration of 4.5·1015 cm−2 and μ-Raman images of partially transformed samples indicates that the density of C54 grains in presence of Ta is about one order of magnitude higher with respect to pure Ti/Si samples.

Copyright

References

Hide All
[1] Beyers, R. and Sinclair, R., J. Appl. Phys. 57, 5240 (1985).
[2] Privitera, S., Via, F. La, Grimaldi, M.G. and Rimini, E., Appl. Phys. Lett. 73(26), 3863 (1998).
[3] Mann, R.W., Miles, G.L., Knotts, T.A., Rakowski, D.W., Clevenger, L.A., Harper, J.M.E., D'Heurle, F.M., Cabral, C. Jr. Appl. Phys. Lett. 67, 3729 (1995)
[4] Moroux, A., Zhang, S.L., Kaplan, W., Nygren, S., Östling, M. and Peterson, C.S., Appl. Phys. Lett. 69(7), 975 (1996).
[5] Mouroux, A., Zhang, S.L. and Petersson, C.S., Physical Review B 56(16), 10614 (1997).
[6] Cabral, C. Jr., Clevenger, L.A., Harper, J.M.E., d'Heurle, F.M., Roy, R.A., Lavoie, C., Miles, G.L., Mann, R.W. and Nakos, J.S., Appl. Phys. Lett. 71, 3531 (1997).
[7] Ohmi, S. and Tung, R.T., J. Of Appl. Phys., 86(7),3655 (1999).
[8] Mouroux, A., Epicier, T., Zhang, S.L. and Pinard, P., Phys. Rev. B 60(12), 9165 (1999).

Effect of a thin Ta layer on the C49-C54 transition.

  • F. La Via (a1), F. Mammoliti (a2), M.G. Grimaldi (a2), S. Quilici (a3) and F. Meinardi (a3)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed