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Edge-On Ion Irradiation of Electron Microscope Specimens*

Published online by Cambridge University Press:  25 February 2011

Mauro P. Otero
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL 60439
Charles W. Allen
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL 60439
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Abstract

A special technique is described for in situ transmission electron microscope (TEM) experiments involving simultaneous ion irradiation, in which the resultant phenomena are observed as in a cross-section TEM specimen. That is, instead of ion-irradiating the film or foil specimen normal to the major surfaces and observing in plan view (i.e., in the same direction), the specimen is irradiated edge-on (i.e., parallel to the major surfaces) and is observed normal to the depth direction with respect to the irradiation. The results of amorphization of Si, irradiated in this orientation by 1 or 1.5 MeV Kr, are presented and briefly compared with the usual plan view observations. The limitations of the technique are discussed and several experiments which might profitably employ this technique are suggested.

Type
Research Article
Copyright
Copyright © Materials Research Society 1992

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Footnotes

**

Also Fundação de Tecnologia Industrial, Lorena-SP 12600, Brasil)

*

Work supported by the U. S. Department of Energy, BES-Materials Sciences, under Contract W-31-109-Eng-38.

References

[1] Biersack, J. P. and Haggmark, L. J., Nucl. Instrum. Methods 174 (1980) 257.CrossRefGoogle Scholar