Skip to main content Accessibility help
×
Home

Dynamics of MEMS Microengines Using Optoelectronic Laser Interferometry

  • G. C. Brown (a1), R. J. Pryputniewicz (a1), M. P. De Boer (a2) and Norman Smith (a2)

Abstract

We have developed an optoelectronic laser interferometry microscope (OLIM) methodology for rapid characterization of MEMS' motion dynamics. In this study, electrostatic comb drive actuated microengines comprised of a 64 μm diameter drive gear and a 300 μm output gear (load gear) were characterized dynamically. Two different input signals were used: 1) a four-step square wave input and 2) an optimized input signal calculated from an analytical model. Out-ofplane motion on rotating microgears was measured as a function of the input signals. The outof-plane motions for the drive during the four-step input ranged from zero to ±462 nm and from zero to ±514 nm for the drive and output gears, respectively. For the optimum input, the out-ofplane motions ranged from zero to ±1030 nm for the drive gear. However, for the output gear the tilt magnitudes were nearly constant at ±514 rum, and were independent of angular position. The more constant out-of-plane motions of the load gear for the optimized signal are due to improved kinematics and kinetics leading to more continuous rather than impulsive forces (e. g., frictional, inertial) acting on the output gear.

Copyright

References

Hide All
1. Garcia, E. J. and Sniegowski, J. J., “Surface micromachined microengine,” Sensors and Actuators A, 48:203214 (1995).
2. Sniegowski, J. J. and Garcia, E. J., “Microfabricated actuators and their applications in optics,” Proc. SPIE, SPIE: Miniaturized systems with micro-optics and micromechanics, 2383:4664 (1995).
3. Brown, G. C., Laser interferometric methodolgies for characterizing static and dynamic behavior of Micro ElectroMechanical Systems (MEMS), Ph.D. Dissertation, CHSLT- Center for Holographic Studies and Laser micro-mechaTronics, Mechanical Engineering Department, WPI, Worcester, MA (1999).
4. Allen, J. J., Miller, S. L., LaVigne, G. F., Rodgers, M. S., and Eaton, W. P., “Dynamic effects of linkage joints in electrostatic microengines,” Proc. Modeling and simulation of microsystems, MSM98, SNL, Santa Clara, CA (1998).
5. Furlong, C., Hybrid, computational and experimental, approach for the efficient study and optimization of mechanical and electro-mechanical components, Ph.D. Dissertation, CHSLT- Center for Holographic Studies and Laser micro-mechaTronics, Mechanical Engineering Department, WPI, Worcester, MA (1999).
6. Kreis, T., Holographic interferometry, principles and methods, Akademie Verlag, Berlin, (1996).
7. Takeda, M., Ina, H., and Koayashi, S., “Fourier transform method of fringe pattern analysis for computer-based topography and interferometry,J. Opt. Soc. Am., 72:156160 (1982).

Dynamics of MEMS Microengines Using Optoelectronic Laser Interferometry

  • G. C. Brown (a1), R. J. Pryputniewicz (a1), M. P. De Boer (a2) and Norman Smith (a2)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.