Skip to main content Accessibility help
×
Home

Dynamical X-Ray Diffraction Studies of Interfacial Strain in Superlattices Grown by Molecular Beam Epitaxy

  • J. M. Vandenberg (a1), S. N. G. Chu (a1), R. A. Hamm (a1), M. B. Panish (a1), D. Ritter (a1) and A. T. Mancrander (a2)...

Abstract

Dynamical X-ray diffraction studies have been carried out for lattice-matched InGaAs/InP superlattices grown by modified molecular beam epitaxy (MBE) techniques. The (400) X-ray satellite pattern, which is predominantly affected by the strain modulation, was analyzed. The strain and thickness of the actual layers including the presence of strained interfacial regions were determined.

Copyright

References

Hide All
1. Vandenberg, J. M., Panish, M. B., Temkin, H., and Hamm, R. A., Appl. Phys. Lett. 53, 1920 (1988).
2. Lyons, M. H., Scott, E. G., and Halliwell, M. A. G., in Microscopy of Semiconducting Materials, Institute of Physics Conference Series 100, Oxford, 1989, edited by Cullis, A. G. and Hutchinson, J. L. (IOP, Bristol, 1989), Sec. 6, p. 473.
3. Chang, J. C. P., Chin, T. P., Kavanagh, K. L., and Tu, C. W., Appl. Phys. Lett. 55, 1530 (1991).
4. Vandenberg, J. M., Macrander, A. T., Hamm, R. A. and Panish, M. B., Phys. Rev. B44, 3991 (1991).
5. Macrander, A. T., Minami, E. R., and Berreman, D. W., J. Appl. Phys. 60, 1364 (1986).
6. Bartels, W. J., in Thin-Film Growth Techniques for Low-Dimensional Structures, Vol. 163 of NATO Advanced Study Institute, Series B: Physics, edited by Farrow, R. F. C. and Dobson, P. J. (Plenum, New York, 1987).
7. Vandenberg, J. M., Gershoni, D., Hamm, R. A., Panish, M. P., and Temkin, H., J. Appl. Phys. 66, 3635 (1989).
8. Fewster, P. F., Phillips J. Res. 41, 268 (1986).
9. Ritter, D., Hamm, R. A., Panish, M. B., Vandenberg, J. M., Gershoni, D., Gunapala, S. D., and Levine, B. F., Appl. Phys. Lett. 59, 552 (1991).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed