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Dynamical X-Ray Diffraction Studies of Interfacial Strain in Superlattices Grown by Molecular Beam Epitaxy

  • J. M. Vandenberg (a1), S. N. G. Chu (a1), R. A. Hamm (a1), M. B. Panish (a1), D. Ritter (a1) and A. T. Mancrander (a2)...


Dynamical X-ray diffraction studies have been carried out for lattice-matched InGaAs/InP superlattices grown by modified molecular beam epitaxy (MBE) techniques. The (400) X-ray satellite pattern, which is predominantly affected by the strain modulation, was analyzed. The strain and thickness of the actual layers including the presence of strained interfacial regions were determined.



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