Skip to main content Accessibility help

Doping of Diamond by Co-Implantation with Dopant Atoms and Carbon

  • G. S. Sandhu (a1), C. T. Kao (a1) and M. L. Swanson (a1)


We have investigated the challenging problem of doping diamonds, by co-implanting boron, nitrogen or phosphorus together with carbon into natural insulating type -a1 diamonds. All the implantations were done at liquid nitrogen temperature and then the samples were rapidly heated to 1100 °C. Unlike the previous attempts to dope diamond by room temperature or high temperature ion implantations, this method is expected to yield a higher doping efficiency for the implanted atoms. We have characterized the implanted diamonds with electrical and electron spin resonance (EPR) measurements. Boron doped samples showed low electrical resistivities and the EPR signal showed a strong dependence on the boron fluence, indicating a high substitutional fraction of boron atoms. The samples in which nitrogen and phosphorus were co-implanted with carbon showed lower resistivities compared with samples implanted with carbon only. Preliminary thermo-emf measurements indicated n-type conduction in these samples.



Hide All
1. Braunstein, G. and Kalish, R., J. Appl. Phys, 54, 2106 (1983).
2. Vavilov, V.S., Gukasyan, M.S., Guseva, M.I., and Konorova, E.A., Soy. Phys. Semicond. 6, 742 (1972).
3. Kalish, R., Bernstein, T., Shapiro, B. and Talmi, A., Rad. Eff. 52, 153 (1980).
4. Braunstein, G., Talmi, A., Kalish, R., Bernstein, T. and Beserman, R., Rad. Eff. 48, 139 (1980).
5. Sandhu, G.S., Swanson, M.L. and Chu, W.K., Appl. Phys. Lett. 55, 1397 (1989).
6. Loubser, J.H.N and van Wyk, J.A., Rep. Prog. Phys. 41, 1201 (1978).
7. Smith, W.V., Sorokin, P.P., Gelles, I.L., and Lasher, G.J., Phys. Rev. 115, (1959) 1546.
8. van Wyk, J.A., J. Phys. C: Solid State Phys. 15, (1982) L981–L983.
9. van Wyk, J.A. and Loubser, J.H.N., J. Phys. C: Solid State Phys. 16, (1983) 1501.
10. Loubser, J.H.N., van Wyk, J.A. and Wellbourn, C.M., J. Phys. C: Solid State Phys. 15, (1982) 6031.
11. Lomer, J.N. and Wild, A.M.A., Phil. Mag. 24, 272 (1971).
12. Lomer, J.N. and Wild, A.M.A., Rad. Eff. 17, (1973) 37.
13. Bourgoin, J.C., Brosious, P.R., Kim, Y.M., Corbett, J.W. and Chrenko, R.M., Phil. Mag. 26, (1972) 1167.
14. Ammerlaan, C.A.J., Inst. Phys. Conf. Ser. No. 59, Oiso Japan (1980).
15. Bell, M.D. and Leivo, W.J., J Appl. Phys. 38(1), (1967) 337.
16. Sandhu, G.S., PhD thesis, University of North Carolina, Chapel Hill NC, 1989.


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed