Skip to main content Accessibility help
×
Home

Doping Influence on TiSi2 C49-C54 Phase Conversion Kinetics by Micro-Raman Spectroscopy

  • F. Meinardi (a1), S. Quilici (a1), L. Moro (a2), G. Queirolo (a3) and A. Sabbadini (a3)...

Abstract

MicroRaman measurements on titanium silicide films grown on single-crystal and polycrystalline silicon substrates doped with As, BF2 and P have been performed. The data collected on patterns of different areas and shapes, but comparable doping level show that the doping has negligible effects both on C54 nucleation center density and on activation energy for the C49/C54 phase transition. On the contrary, substrate strongly affects the C54 growth rate, ruling the ability of the C54 phase to propagate after the nucleation.

Copyright

References

Hide All
1. Maex, K., Mater. Sci. Eng. Rep. R 11, 53 (1993).
2. Raaijmakers, I.J.M.M., Reader, A. H. and van Houtum, H. J. W., J. Appl. Phys. 61, 2527 (1987).10.1063/1.337928
3. Ma, Z. and Allen, L.H., Phys. Rev. B 49, 13501 (1994).
4. Jeon, H., Sukow, C.A., Honeycutt, J.W., Rozgonyi, G.A., and Nemanich, R.J., J. Appl. Phys. 71, 4269 (1992).
5. Saenger, K. L., Cabral, C. Jr Clevenger, L. A., Roy, R. A. and Wind, S., J. Appl. Phys. 78, 7040 (1995).
6. Kittl, J.A., Prinslow, D.A., Apte, P.P., and Pas, M.F., Appl. Phys. Lett. 67, 2308 (1995).
7. Beyers, R., Coulman, D., and Merchant, P., J. Appl. Phys. 61, 5110, (1987).
8. Clevenger, L. A., Mann, R. W., Roy, R. A., Saenger, L., Cabral, C. and Piccirillo, J., J. Appl. Phys 76, 7874 (1994)
9. Colgan, E. G., Clevenger, L. A. and Cabral, C. Jr, Appl. Phys. Lett. 65, 2009 (1994)
10. Grimaldi, M. G., Via, F. La and Raineri, V., Europhys. Lett. 40, 581 (1997).10.1209/epl/i1997-00508-7
11. Matsubara, Y., Horiuchi, T. and Okumura, K., App. Phys. Lett. 62, 2634 (1993).
12. Singh, S., Solak, H., Krasnoperov, N., Cerrina, F., Cossy, A., Diaz, J., Stohr, J. and Samant, M., Appl. Phys. Lett. 71, 55 (1997).
13. De Wolf, I., Howard, D. J., Lauwers, A., Maex, K. and Maes, H. E., Appl Phys. Lett. 70, 2262 (1997).
14. Meinardi, F., Moro, L., Queirolo, G. and Sabbadini, A., Europhys. Lett. submitted
15. Miles, G. L., Mann, R. W. and Bertsch, J. E., Thin Solid Films 290, 469 (1996).

Doping Influence on TiSi2 C49-C54 Phase Conversion Kinetics by Micro-Raman Spectroscopy

  • F. Meinardi (a1), S. Quilici (a1), L. Moro (a2), G. Queirolo (a3) and A. Sabbadini (a3)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed