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Direct-Write Micro- and Nanostructuring with Femtosecond Lasers

Published online by Cambridge University Press:  01 February 2011

B. N. Chichkov ,
J. Koch ,
A. Ovsianikov ,
S. Passinger ,
C. Reinhardt  and
J. Serbin
B. N. Chichkov
Affiliation:
Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany
J. Koch
Affiliation:
Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany
A. Ovsianikov
Affiliation:
Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany
S. Passinger
Affiliation:
Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany
C. Reinhardt
Affiliation:
Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany
J. Serbin
Affiliation:
Laser Zentrum Hannover e.V., Hollerithallee 8, 30419 Hannover, Germany
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Abstract

Our recent progress in the direct-write femtosecond laser material processing technologies, nanostructuring, and fabrication of photonic devices is reviewed. Special attention is given to the sub-wavelength microstructuring of metals and two-photon polymerization (2PP) technique. Formation of microbumps and nanojets on thin metal films under single pulse laser irradiation is discussed. Microstructuring of different photosensitive materials by 2PP technique is demonstrated. Numerous applications of this technology for the fabrication of 3d structures, waveguides, photonic crystals, etc. are studied.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 850: Symposium MM – Ultrafast Lasers for Materials Science , 2004 , MM2.5
Copyright
Copyright © Materials Research Society 2005

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References

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