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Direct Writing of 3D Microstructures Using a Scanning Laser System

Published online by Cambridge University Press:  01 February 2011

Hui Yu ,
Alexander Grüntzig ,
Yi Zhao ,
André Sharon ,
Biao Li  and
Xin Zhang
Hui Yu
Affiliation:
Department of Manufacturing Engineering and Fraunhofer USA Center for Manufacturing Innovation, Boston University, Boston, MA 02215, USA
Alexander Grüntzig
Affiliation:
Department of Manufacturing Engineering and Fraunhofer USA Center for Manufacturing Innovation, Boston University, Boston, MA 02215, USA
Yi Zhao
Affiliation:
Department of Manufacturing Engineering and Fraunhofer USA Center for Manufacturing Innovation, Boston University, Boston, MA 02215, USA
André Sharon
Affiliation:
Department of Manufacturing Engineering and Fraunhofer USA Center for Manufacturing Innovation, Boston University, Boston, MA 02215, USA
Biao Li
Affiliation:
Department of Manufacturing Engineering and Fraunhofer USA Center for Manufacturing Innovation, Boston University, Boston, MA 02215, USA
Xin Zhang
Affiliation:
Department of Manufacturing Engineering and Fraunhofer USA Center for Manufacturing Innovation, Boston University, Boston, MA 02215, USA
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Abstract

In this paper, a new revolutionary 3D manufacturing approach to rapid processing of 3D microstructures in both soft (SU-8) and rigid (Si) materials is introduced. This technique facilitates very fast prototyping without the need of masks, resulting in a low-cost, short-turnaround flexible fabrication process.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 782: Symposium A – Micro- and Nanosystems , 2003 , A11.5
Copyright
Copyright © Materials Research Society 2004

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References

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