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Direct Patterning of Quartz Substrates by Laser Ablation Using VUV Anti-Stokes Raman Pulses

  • K. Sugioka (a1), S. Wada (a1), H. Tashiro (a1), K. Toyoda (a1), T. Sakai (a2), H. Takai (a2), H. Moriwaki (a3) and A. Nakamura (a3)...

Abstract

High speed microfabrication of quartz substrates by laser ablation using vacuum ultraviolet (VUV) laser beams is described. The VUV light is generated by anti-Stokes stimulated Raman scattering of fourth harmonics of Q-switched Nd:YAG laser. The well-defined patterns with a cross-sectional profile of rectangular shape are formed by using a contact mask. The role of short wavelength components of the VUV laser beams in the process is discussed.

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Direct Patterning of Quartz Substrates by Laser Ablation Using VUV Anti-Stokes Raman Pulses

  • K. Sugioka (a1), S. Wada (a1), H. Tashiro (a1), K. Toyoda (a1), T. Sakai (a2), H. Takai (a2), H. Moriwaki (a3) and A. Nakamura (a3)...

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