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Diffusion and Adhesion of Cu/Parylene

  • G. Yang (a1), S. Dabral (a1), L. You (a1), H. Bakhrut (a2), J. F. McDonald (a1) and T.-M. Lu (a1)...


The combination of Cu and parylene (poly-p-xylylene) for metallization and insulator in integrated circuit or packaging multilayer interconnection systems gives one of the lowest resistance and capacitance values per unit length. In this paper we present a detailed study of the diffusion characteristics of Cu in parylene-n (PA-n) substrates. PA-n was vapor-deposited and Cu metallization performed at room temperature using the Partially Ionized Beam (PIB) technique. Rutherford Backscattering (RBS) technique has been used to study the diffusion of Cu in PA-n substrate after annealing the samples to elevated temperatures in vacuum. We found no sign of Cu diffusion after the Cu/PA-n sample was annealed at 300°C for 6 hours. Diffusion occurs at 350 °C. However, preannealed PA-n substrate prior to Cu deposition can prevent the diffusion even at a temperatures above 350°C. Also we found that amorphous carbon and chromium are good diffusion barriers of Cu on PA-n. The dry adhesion between PA-n deposited on Al, Cu and Ag was found to be good. The adhesion of these PIB deposited metals on PA-n in high vacuum was also very good.



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[1.]Majid, N., Dabral, S., and McDonald, J. F., I.E.E.E. J. Electronic Materials, Vol. JEM–18(#2), 301311, (1989).
[2.]Gorham, W.F., US Patent 3,342,754, Para-Xylylene Polymers, Sept. 1967.
[3] Faupel, F., Gupta, D., Silverman, B. D., and Ho, P. S., Appl. Phys. Lett., 55(4), 24 July 1989, pp 357.
[4.]Hang, K.W., Onyshkevych, L.S., Prabhu, A.N., Thaler, B.J., IEEE-ECC, pp. 629, 1988.
[5.]Zebrauskas, A., J. Adh. Sci. Technol., Vol.4, No.1, 1990, pp. 2533.
[6.]McDonald, J. F., Dabral, S., Yang, G. and T. -M. Lu, VMIC Santa Clara, Ca, 241, (1990).
[7.]Lu, T. -M., McDonald, J. F., Dabral, S., Yang, G. -R., and Bai, P., MRS Spring 1990.
[8.]Bai, P., Yang, G. -R., and Lu, T. -M., Appl. Phys. Lett. 56(2), 198, (1990).
[9.]Gland, J.L. and Somorjai, G. A., Surface Science 38, 157186, (1973).


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